H_75nm_L1_65um_D_10um

796100390358552e 5 17898680325333263e 5

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Unformatted text preview: 01404984087646E-6-5.236765391065782E-8i 2.2500000000000008E-4 7.214068780456685E-5 0 1.9585122877207456E-7+1.0345352906904078E-7i 2.5894467048385183E-9+1.959845935279453E-9i 1.337269427690059E-6+6.561214814325928E-8i 2.2497427923856203E-4 7.314063083562798E-5 -1.1652509842807306E-6 1.984252626272922E-7+9.061842575323264E-8i 3.027999922799639E-9+7.966545776874742E-10i 1.1424613887751569E-6-3.5221072839404216E-8i 2.2641545907643176E-4 1.00110043463808E-4 -1.6313338689658348E-6 9.590228278882247E-8+3.249154976583585E-8i 6.873263908881464E-9+1.204730960639401E-9i 9.891217269442361E-7-7.755279255882563E-8i 2.263241431090567E-4 9.723085973712367E-5 0 3.5562976742746375E-10-1.1103102630487123E-8i 4.1674216500115803E-10+2.1017859126391152E-10i 1.0534553768371543E-6-5.0451328048218963E-8i 2.2574354158312593E-4 9.797916894700815E-5 -1.6139943112772567E-6 1.3185318494487247E-7+5.12804278553397E-8i 7.66264796844188E-9+1.7064835823929009E-9i 1.0232076464156096E-6-6.58237996538059E-8i 2.2686874828482708E-4 9.561499810519493E-5 0 -3.2027917037241727E-10-1.014323515544785E-8i 1.5291817966692674E-9+8.02318091521273E-10i 1.014446101444265E-6-7.103768705410634E-8i 2.2656469037317956E-4 9.457248607423781E-5 -1.7775821251753318E-6 1.0190729280029722E-7+3.526384583140441E-8i 6.240976589067539E-9+9.03289290859078E-10i 9.98313420873214E-7-7.888754197639304E-8i 2.2708651084137198E-4 9.766564846575526E-5 -1.2362892763666983E-6 6.677088657446528E-8+2.0212560466095873E-8i 4.349555123722444E-9+5.232654598031142E-10i 9.88559919117948E-7-7.791628860682542E-8i 2.2500000000000002E-4 1.119311320347898E-4 0 1.5345185936859783E-7+7.471023027705108E-8i -1.4577292772761466E-10-5.609379471332998E-10i 1.1617939285484708E-6+2.427385419668597E-8i 2.2572730653312037E-4 1.1260585792463892E-4 -1.0573812890864014E-6 9.702403516626998E-8+3.603226091383633E-8i 6.216359312745891E-9+1.3335220596193632E-9i 9.946507786980163E-7-5.9406606481390076E-8i 2.2500000000000002E-4 1.1020111272043227E-4 0 1.4610029161267443E-7+7.04166369412893E-8i 3.4995443546053523E-9+1.8373945990269684E-9i 1.1737799989328748E-6+2.7322915548812352E-8i 2.256028771922448E-4 1.107947940102961E-4 -1.1056078193374735E-6 1.0975913044952967E-7+4.2425371413694736E-8i 4.907093427340773E-9+5.735279751185635E-10i 1.0076922885584756E-6-5.583920946893755E-8i 2.25E-4 1.0847109340607474E-4 0 1.482950587120902E-7+7.16783303077361E-8i 1.8206095935523193E-9+9.436888706235157E-10i 1.1923377754948133E-6+3.378943859439547E-8i 2.264693262011941E-4 1.0948947303269088E-4 -1.7352598623199718E-6 9.0836557875332E-8+2.9891216770913784E-8i 7.992603895448877E-9+1.307105940235513E-9i 9.483988256561637E-7-8.508411275050892E-8i 2.2500000000000008E-4 9.117090026249958E-5 0 1.7792297174872313E-7+9.094761546860676E-8i 3.880669389457435E-9+1.5815556154204907E-9i 1.3019201975308149E-6+6.706392909765912E-8i 2.267002100215378E-4 9.377497556406736E-5 0 -3.9974304009161654E-9-1.3236274466595666E-8i -5.092260344001726E-10-3.810950860438922E-10i 1.0387968189067873E-6-6...
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This document was uploaded on 01/24/2014.

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