H_75nm_L1_65um_D_10um

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Unformatted text preview: 742047E-6 -7.440018986355771E-7 1.7827009023846114E-6-4.996028518332467E-7i 3.148645227402811E-7-1.4145573934395655E-7i 3.6685460161079656E-5-8.72863425975469E-6i 1.0749150831493437E-5 3.2609064739003516E-6 -6.92095279440125E-7 1.6628917289731441E-6-4.553406978639898E-7i 1.8780842054401615E-7-8.353987675165422E-8i 3.6962183907062874E-5-8.792000242563822E-6i 1.063693069939674E-5 3.715875268147349E-6 0 9.34415258230881E-8-6.831342790232509E-8i 9.35245416038457E-9-4.341489580488221E-8i 3.708638482692598E-5-8.791228371058293E-6i 1.0143942271477606E-5 3.873300836249768E-6 -7.875214826987168E-7 2.006411767580449E-6-5.46296545361248E-7i 2.828373565894801E-7-1.1354858124257873E-7i 3.822600851413066E-5-9.106447725569048E-6i 1.002940086927676E-5 4.035409377768661E-6 0 1.0627616395537311E-7-8.199260486157035E-8i 2.243009489507922E-8-5.037242222139476E-8i 3.842284445897E-5-9.124021026682563E-6i 1.0188809701889331E-5 4.27754377096085E-6 -4.141209501578371E-7 1.1461067440124883E-6-3.487238236718346E-7i 2.9986713622253666E-7-1.4185664241421017E-7i 3.797197170459486E-5-9.032413622433902E-6i 1.0833918352675667E-5 2.705469920964807E-6 0 9.322237551432494E-8-6.244407919440282E-8i 1.266276439711167E-8-2.3141799724429867E-8i 3.6912781627669586E-5-8.767740362637666E-6i 2.0025817636710574E-5 3.107679414811299E-6 0 -1.2937841893606978E-7+5.1941029864319144E-8i -6.112381337372475E-8+1.9257942258981856E-8i 2.225752289673292E-5-5.537240824484362E-6i 2.0785795327378688E-5 1.4365396177051521E-6 0 7.614016142742641E-8-1.2912390350273568E-8i 7.344090361240466E-9-1.5570318147147568E-9i 2.1931805186060747E-5-5.453722816243179E-6i 2.0699504525080774E-5 2.64351761161669E-6 0 1.1180309362470094E-7-2.5498048458179242E-8i 2.0298028216303015E-8-6.927941928336132E-9i 2.201493953858345E-5-5.485002079297708E-6i 2.0313200394927574E-5 2.504988134661789E-6 -1.2628713669012087E-6 1.1369393851843486E-6-2.775955622892292E-7i 5.7197991800787953E-8-3.595268327466641E-9i 2.249475514384835E-5-5.613738885730985E-6i 2.128130590395375E-5 2.3284011167237975E-6 -9.22735624130289E-7 8.275698110165964E-7-2.018212667938677E-7i 4.89145884353644E-8-5.955963578811267E-9i 2.154362960996304E-5-5.371056421318969E-6i 2.0544350844476E-5 5.409567200744653E-7 0 -2.6291338225505164E-8+2.30183103285507E-8i 4.776579787259541E-9-2.5855149691895474E-10i 2.1990755672290402E-5-5.4594452569604825E-6i 2.136597859493046E-5 -2.347593878749148E-7 -7.399614386860768E-7 6.48131305500002E-7-1.5566322850422015E-7i -1.3811674160088777E-9+4.237119022545868E-10i 2.1516953150815194E-5-5.356323316178474E-6i 2.1957662059693764E-5 6.250526125848091E-7 0 4.6541430129601425E-8-1.16999901328419E-8i 1.6342045665831145E-9-4.1836777370120953E-10i 2.100810443675652E-5-5.22847297269667E-6i 2.1668614482949763E-5 2.0526642104760895E-6 0 4.389236882520665E-8-1.0715660378318788E-8i 3.022827088268391E-9-2.410786986312015E-9i 2.1206171206153628E-5-5.2833426292922885E-6i 3.712721486675297E-5 3.641856588003302E-6 0 2.567741705620221E-8-1.2396386911818578E-8i -2.9938728...
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This document was uploaded on 01/24/2014.

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