H_75nm_L1_65um_D_10um

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Unformatted text preview: 028755589E-4 -1.55E-4 0 6.819165375496206E-7-1.5117633746924986E-7i 8.556233895593902E-7-3.746041672794355E-7i 7.17846467066241E-5-1.848741219445671E-5i -1.4832701352784808E-4 -1.5639840792862532E-4 0 1.8110076869561065E-8+1.4646921664534148E-8i -1.2430217667086519E-6+2.8707370017625836E-7i 4.567675512014169E-5-1.214016525056724E-5i -1.543359320000041E-4 -1.55E-4 0 1.0759667705325289E-6-2.463109260257094E-7i 2.3083926503758713E-6-7.275054757480082E-7i 7.269074176004715E-5-1.868434636868403E-5i -1.5874956099910085E-4 -1.564213616773155E-4 0 -2.947087922972972E-7+8.562737852056227E-8i -2.1771473661817237E-6+5.143975962740299E-7i 4.4427093784856854E-5-1.1814801649495665E-5i -1.5896272506223797E-4 -1.5602331635609885E-4 2.0307076116746E-6 2.63286605652256E-7-6.195920493186149E-8i 1.3673975318168994E-5-3.4913519098036882E-6i 3.9800941480231875E-5-1.0705038106685889E-5i -1.535646921924639E-4 -1.5647735665090285E-4 0 -6.915003188996356E-7+1.8044314601391246E-7i -1.3226371813057636E-6+3.2145682071363206E-7i 4.4807138190775324E-5-1.1921294546224784E-5i -1.5008267465040653E-4 -1.5698038932978085E-4 0 -2.929719767119643E-7+8.27504003771129E-8i -1.6207441225997431E-6+3.8693604057227217E-7i 4.158054230880383E-5-1.111213440707545E-5i -1.5186112109368612E-4 -1.570711465142075E-4 0 8.74841665702078E-7-1.9202953130172581E-7i -1.7908476458786127E-6+4.2023250381116134E-7i 3.943086726225562E-5-1.057971725047974E-5i -1.5513899330093264E-4 -1.5690073200504682E-4 0 -7.735765065086356E-7+1.9539838347079002E-7i -3.597876371423978E-6+8.540060780338877E-7i 4.1056384387466363E-5-1.0982404561021853E-5i -1.5364475781555158E-4 -1.58736640046661E-4 0 -2.4371504660812667E-8+2.0358810345899592E-8i -7.229431543249475E-7+1.7179770044275853E-7i 3.408141466112748E-5-9.163514085412535E-6i -1.4396835725333294E-4 -1.5499999999999997E-4 0 5.30142293841962E-7-1.1490089698214707E-7i 2.2545787204925406E-6-6.980452526264669E-7i 7.298547419258099E-5-1.8720025164527716E-5i -1.4224042812888775E-4 -1.5499999999999997E-4 0 7.860812471320126E-7-1.5822479818942506E-7i 2.5191341596742294E-6-7.748654290033762E-7i 7.221052270863411E-5-1.852188695202391E-5i -1.4569628637777814E-4 -1.5499999999999995E-4 0 -7.784885588139542E-7+2.001800305432485E-7i -6.40653910846937E-8-1.6570622755239645E-7i 7.193096687762137E-5-1.8482711118155863E-5i -1.4742421550222333E-4 -1.5499999999999997E-4 0 9.01862821830098E-7-1.890895227803687E-7i 2.010541658766946E-6-6.442490529176328E-7i 7.405982706902338E-5-1.9014418758016755E-5i -1.767990106177916E-4 -1.55E-4 0 -2.2778249406107953E-7+6.717977792114471E-8i 6.443079432684251E-7-4.0994438652011106E-7i 6.248278275067243E-5-1.5789539251631624E-5i -1.7585780645432397E-4 -1.5688167070976756E-4 0 -5.254413113795328E-7+1.3490634008715497E-7i -1.980940215954336E-6+4.5459618019145456E-7i 3.661539851944141E-5-9.695906726686087E-6i -1.7852693974223678E-4 -1.5499999999999997E-4 0 6.980755796655765E-7-1.4060982526468516E-7i 1.5655513147912553E-6-6.425278802419673E-7i 6.101556567609615E-5-...
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This document was uploaded on 01/24/2014.

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