H_75nm_L1_65um_D_10um

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Unformatted text preview: 311195949781775E-9-2.45880712120204E-10i 1.1097024410559294E-6-9.133138342067354E-8i 2.2144010193454397E-4 -4.7429022096641285E-5 7.500000000000001E-8 -3.494550547283624E-7-1.835054465587258E-7i -1.1133059345887573E-8-2.2120644834453198E-9i 1.0031295782751956E-6-1.5630449973356368E-7i 2.257266734203459E-4 -5.568694413855541E-5 1.2203525806598045E-6 -1.0999529005075038E-7-6.41842473202631E-8i -7.091017280717244E-10-6.794498638151177E-10i 1.1251351309167048E-6-5.5473796538955284E-8i 2.2796887585122612E-4 -5.509110162118364E-5 0 6.14992842683194E-9-3.1056558281441703E-9i 1.947039586242677E-9+1.1071942101212665E-9i 1.0304048211514685E-6-8.866510802498992E-8i 2.2386872539662764E-4 -5.78690100105989E-5 2.2875515853365325E-6 -2.459031442299748E-7-1.1819493850515864E-7i -2.427415659496672E-9-1.1452088134860279E-9i 1.0567113453342707E-6-1.0665027268296542E-7i 2.2661553170860317E-4 -5.19465937231568E-5 0 2.1441767078480054E-8+1.4502835818525886E-8i 4.744586454296686E-9+2.7823015606124202E-9i 1.0966702960087726E-6-6.033967997674703E-8i 2.26284237237206E-4 -4.918694483957867E-5 1.680790142328661E-6 -9.471567155681843E-8-4.9589836313422715E-8i -2.3233891172858645E-9-1.4656388611359034E-9i 1.071006849658614E-6-8.211925435707311E-8i 2.276913209234822E-4 -5.0242809702608494E-5 0 3.0199213318839874E-9-5.253889624919072E-9i 5.562664481871624E-11-1.3812143930761605E-11i 1.0385512876846823E-6-8.712134492994205E-8i 2.2634977431381094E-4 -4.655748455188637E-5 1.7276232205037135E-6 -9.257144921470709E-8-4.887818360630987E-8i -1.8754342228727898E-9-5.196363968961897E-10i 1.057451038573732E-6-8.956197990585366E-8i 2.2854790290259045E-4 -4.504232630585443E-5 0 3.2040711738982356E-9-4.50534986531941E-9i -8.326545548639923E-10-4.106765594325097E-10i 1.0039853084897092E-6-1.0225020345895099E-7i 2.2410668048910114E-4 -4.8073746106494037E-5 1.0910816964157948E-6 -2.614839278752799E-7-1.419263415421703E-7i -2.8049649590263463E-9-7.830134170783436E-10i 1.1277141060850764E-6-7.567428585292955E-8i 2.2332494268719426E-4 -4.889352837968627E-5 7.5E-8 -3.8173778843584964E-7-2.0013277886917619E-7i -3.803832689152145E-9-5.4449187042796E-10i 1.0710494121168703E-6-1.1060128903654202E-7i 2.2149495810984106E-4 -5.035700004082114E-5 7.500000000000001E-8 -3.616389649909249E-7-1.869285282300144E-7i -8.79581473812024E-9-1.5104465263607314E-9i 1.007609595744143E-6-1.5294749142214762E-7i 2.2371542432253846E-4 -5.0485255315002554E-5 7.500000000000001E-8 -3.7392733804173855E-7-1.9758922168869715E-7i -5.896623557116929E-9-1.527090867511607E-9i 1.1227375525402405E-6-8.605117713314511E-8i 2.2854782748404535E-4 -4.782068291241706E-5 0 1.1521524082275349E-8+1.359282014597268E-10i -3.191057840241177E-10-2.128487013603964E-10i 1.0083083105400064E-6-9.925539966653359E-8i 2.2676778978505385E-4 -2.9725828673276135E-5 0 1.8322339609643635E-8+6.806987591936821E-9i -2.9517953042376742E-9-3.1326932524970577E-9i 1.0421836930087935E-6-8.50380724326876E-8i 2.2688249901022965E-4 -2.7914342568725696E-5 0 1.0811797292...
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This document was uploaded on 01/24/2014.

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