H_75nm_L1_65um_D_10um

843771738203268e 5 7500000000000002e 8

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Unformatted text preview: 6E-5+3.0362949281492746E-6i -2.483919934002099E-4+5.692639109648271E-5i -0.0019514614228262662+4.498116707977495E-4i -6.260628222359698E-5 -5.140512342739997E-6 2.2487714596669553E-6 -3.105209473192386E-5+7.283999225875447E-6i 0.0014569344746313809-3.371094577240156E-4i -0.001452549217737359+3.356356156247357E-4i -6.602351494423309E-5 -3.6542935477131445E-6 0 1.4564578456958308E-5-3.360503321520924E-6i -6.502704761989162E-5+1.4864053106332595E-5i -0.0021033271552812222+4.8451947449545187E-4i -6.344710676326106E-5 -5.0E-6 0 2.395831074382404E-5-5.421451926210241E-6i 3.167883361594598E-4-7.339223397072359E-5i -0.004303453580486005+9.892588521542844E-4i -6.514451602182385E-5 -5.0E-6 0 6.50927948716018E-5-1.4994914429207936E-5i 1.241579852602923E-4-2.957823681960965E-5i -0.004293995516202909+9.86724168156113E-4i -6.684192528038667E-5 -5.0E-6 0 2.152246356309136E-5-5.134191527182234E-6i -7.950236931144972E-5+1.6458692840858172E-5i -0.004413414027421063+0.0010139568528573463i -5.6745810701020786E-5 -1.2204467725654159E-5 1.6048413807092095E-6 -1.25645341516806E-5+2.990800515909227E-6i 4.4883972330434874E-4-1.0406398123920653E-4i 0.0010140651923860647-2.3711862093535335E-4i -5.298764520894832E-5 -1.3926185598206117E-5 0 4.059752387240711E-6-9.659929145394707E-7i -6.403247011511209E-6+1.5092731500701563E-6i 7.410110456607999E-4-1.734901485870799E-4i -6.505228478759428E-5 -1.0E-5 0 -7.564689568256844E-5+1.7340206626248467E-5i -7.022043093386E-5+1.559856324366162E-5i 0.0039044832628859945-9.051231468800173E-4i -6.162835961843984E-5 -1.0000000000000003E-5 0 1.4403853220971522E-5-3.351207138753883E-6i -1.933389447532162E-4+4.392040995884267E-5i 0.0036458132180992885-8.4532472484468E-4i -5.9916397033862635E-5 -1.0E-5 0 -1.2475539749864004E-4+2.8493476698828363E-5i -8.508949048304957E-5+1.8914700479217042E-5i 0.0037936652566576325-8.795463385251075E-4i -5.5384388674798994E-5 -1.3734207303779314E-5 0 -2.955008478791725E-6+6.562905262013439E-7i -2.3265851579388662E-5+5.419226948616659E-6i 7.637255928622928E-4-1.7890255196206543E-4i -5.815885545761358E-5 -1.381905716900866E-5 0 2.183748007827946E-6-5.343137339991477E-7i -2.0645042243928793E-5+4.808205997798836E-6i 7.858394496013266E-4-1.8421736817997466E-4i -5.9282531952156944E-5 -1.208724280284416E-5 1.3046588546015558E-6 -1.1350608684107706E-5+2.706622489016241E-6i 4.2898905056633325E-4-9.948544297026622E-5i 9.843310423388318E-4-2.3044756199345345E-4i -6.072035511180398E-5 -1.1396701435127942E-5 0 2.334715448908999E-5-5.404057759655911E-6i -7.609262431133272E-5+1.761123342550695E-5i 0.0014741037638590498-3.4414116309910053E-4i -6.245177967120819E-5 -1.1992362858434736E-5 0 -4.654190638765059E-5+1.0602284758188688E-5i -2.6605294577420723E-4+6.126463757574802E-5i 0.0010591677847784939-2.4826833342800315E-4i -6.22793763973094E-5 -1.1411986449203414E-5 1.8567236607331022E-6 -8.988004115251655E-6+2.213969178157347E-6i 7.037462891419066E-4-1.6314683205276496E-4i 0.001086721451953912-2.545348986565314E-4i -5.904520258...
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This document was uploaded on 01/24/2014.

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