H_75nm_L1_65um_D_10um

850013787213327e 4 6893163582093224e

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Unformatted text preview: 24E-20-4.116747715078691E-20i -2.9205165966229E-19+7.204682659045067E-20i 2.180427285861149E-18-4.9020307075326785E-19i 0 0 -7.479999999999999E-4 3.876920726220579E-8-1.0493062379151517E-8i -3.282672981828244E-12+1.2416191045337202E-12i -1.6260611499377922E-7+4.204525507413531E-8i 0 -6.510299812105113E-20 -7.615999999999998E-4 3.207062758056637E-9-9.34721974699765E-10i -8.895074978395178E-12+2.455093913762608E-12i -2.722480857143254E-8+7.052588907628439E-9i 0 -8.168154563747454E-20 -7.751999999999998E-4 3.485657515104989E-10-1.2001168009671796E-10i -6.81042315541367E-13+2.0334115634973732E-13i -4.722649363020609E-9+1.2237220654539652E-9i 0 -5.631586793427234E-20 -7.887999999999999E-4 3.28622980098393E-11-1.6443322561264462E-11i -9.144135663520804E-14+2.371558108791472E-14i -7.133022004148389E-10+1.849919211940253E-10i 0 1.407437096236469E-20 -8.024000000000001E-4 1.9339470192406505E-12-1.821862252056105E-12i -4.318083095014425E-15+2.873026574767423E-16i -5.560902370462535E-11+1.4738077466414574E-11i 0 0 -8.159999999999999E-4 4.1834618691081027E-19-6.3571434292046075E-19i -1.3332578752326431E-20+2.9075576284578966E-21i -1.0543518836374662E-19+1.647354688845871E-19i -7.336273205105984E-4 0 -1.4592788916330973E-4 -1.202585234095403E-7+3.1033290056242985E-8i 1.9295423645676097E-10-4.9130788508620827E-11i 1.1785963442455664E-7-3.027779257060292E-8i -7.469659990653366E-4 0 -1.4858112351173364E-4 -1.1274120241155874E-8+2.88837162162522E-9i -2.597358877346106E-12+7.025571584894795E-13i 1.2883879926496585E-8-3.241483842569703E-9i -7.648217057666232E-4 -5.35595527277744E-5 -1.145171284124508E-4 -1.2141801892321674E-9+3.071763637719985E-10i -8.805990684160889E-11+2.250272838301735E-11i 2.2402544876940313E-9-5.502771909276152E-10i -7.603046776200748E-4 0 -1.5123435786015713E-4 -1.59268314313888E-9+4.040450572923316E-10i -4.190113668782575E-13+1.213069894320059E-13i 2.0940646143968225E-9-5.126632352607177E-10i -7.782396304291953E-4 -5.449919400370025E-5 -1.1652620084073941E-4 -1.6317065921637193E-10+4.0608723262222066E-11i -1.1853886201767682E-11+3.0183788868193177E-12i 3.103464040355244E-10-7.227380826692167E-11i -7.736433561748127E-4 0 -1.5388759220858112E-4 -2.1455309669731928E-10+5.3549557515155194E-11i 7.537943649924673E-15+3.4187220441090775E-15i 2.9097589739764543E-10-6.729413374452567E-11i -7.869820347295508E-4 0 -1.56540826557005E-4 -1.4633037718648284E-11+3.487221701376969E-12i 6.127003704733978E-15-2.84511157122323E-15i 1.78609856092032E-11-3.2967948464838605E-12i -8.00320713284289E-4 0 -1.5919406090542877E-4 -3.738038582194833E-19-1.3656502630052577E-20i 1.1770587669595983E-21+6.568847419773862E-22i 1.755511468709482E-18+6.297405001264435E-20i -7.336273205105984E-4 -1.4592788916330973E-4 0 1.06703898954394E-8-2.976281124513403E-9i 2.2019042713708734E-9-6.518551563022974E-10i 1.4455569824402988E-7-3.7202352829522266E-8i -7.469659990653366E-4 -1.4858112351173367E-4 0 -8.308563726258125E-10+1.9220117314042308E-10i -1.945447003365693E-10+4.226617124599751E...
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This document was uploaded on 01/24/2014.

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