H_75nm_L1_65um_D_10um

853780683702614e 5 49999999999999996e 6 0

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Unformatted text preview: 002E-8 -1.471899018550309E-7-7.59345306180858E-8i 1.336153738620065E-8+5.8508355670597815E-9i 8.117231549703257E-7-1.3895585383173748E-7i 1.9774908425469512E-4 -1.5609898428827068E-4 2.033048554124893E-6 -1.932789746348819E-8-2.323018516856128E-9i 7.651319821428178E-8+4.219771185553535E-8i 9.635412357115773E-7-1.338635669280304E-7i 2.0006236362433223E-4 -1.5321734090399585E-4 7.5E-8 -1.1810901153075601E-8-6.81497145463746E-9i 2.5712336197124464E-7+1.2228179519400986E-7i 9.68083088714044E-7-1.4455534866889904E-7i 1.9837645338985233E-4 -1.538521404330671E-4 7.500000000000002E-8 -6.211004504919607E-9-4.898845789646677E-9i 2.362020191766496E-7+1.2168453814360045E-7i 1.0336880922985738E-6-1.223144243679034E-7i 2.0426949773126165E-4 -1.5469166719045502E-4 1.5648587787620895E-6 -1.9308388340767126E-8-4.597601096887267E-9i 1.1263726192002003E-7+6.396423358543131E-8i 9.347910884337968E-7-1.293780371581582E-7i 2.0355882404820538E-4 -1.5369760017706007E-4 7.500000000000002E-8 -1.2081131018909947E-8-6.6015862935160825E-9i 2.2461372513847555E-7+1.0987620224555247E-7i 9.40362782568301E-7-1.400680349443556E-7i 2.0356176215730607E-4 -1.513033032951116E-4 7.500000000000002E-8 -2.504430443912129E-8-1.3293250500199118E-8i 2.1155128392937088E-7+1.0135452921431613E-7i 8.62510755726018E-7-1.7693397191464461E-7i 2.0207576588981461E-4 -1.5347628460237047E-4 2.3341471175049785E-6 -3.2456596092946276E-8-7.162890448117503E-9i 1.464789978669809E-7+7.235552183739534E-8i 9.122519158834383E-7-1.514304034912725E-7i 2.0108278258475703E-4 -1.5103549859335057E-4 7.500000000000001E-8 -2.696944248271824E-8-1.4065554889500695E-8i 2.2332146637305794E-7+1.0673681443293247E-7i 8.793874149962443E-7-1.799726512452812E-7i 1.898967517160455E-4 -1.559736405591972E-4 1.290865415332667E-6 -1.2573988624270667E-8-2.1800306483261514E-9i 8.005312696883363E-8+4.9227534830412916E-8i 1.079731114318088E-6-1.1560439658882222E-7i 1.896453841656322E-4 -1.5310529080068085E-4 7.500000000000001E-8 -9.022952116022332E-9-6.55786879313891E-9i 3.080751828410649E-7+1.4708962930761598E-7i 1.0488387992678217E-6-1.5339522649329058E-7i 1.9153516058296912E-4 -1.5316450621682037E-4 7.500000000000001E-8 -1.095250391491831E-8-6.87133922122607E-9i 3.0797380367788423E-7+1.456489106986189E-7i 1.0356230117874791E-6-1.5021053903061324E-7i 1.9018505253980974E-4 -1.5302382375159159E-4 2.0041572412048918E-6 -2.9088509304371577E-8-5.975636689980463E-9i 2.2383515340503307E-7+1.0449207336591415E-7i 1.0163568367648198E-6-1.601731939429149E-7i 1.9067136967628915E-4 -1.5105313783711326E-4 7.500000000000001E-8 -2.166847334686417E-8-1.1857755530253478E-8i 2.892061182546007E-7+1.354849274697728E-7i 9.624633785353109E-7-1.899095319128742E-7i 1.8801241727316734E-4 -1.5125254351099185E-4 7.500000000000001E-8 -1.9334835113265287E-8-1.0860255046439868E-8i 3.078642965661531E-7+1.4381243163999776E-7i 9.87416567293812E-7-1.912556236756378E-7i 1.9315132418091176E-4 -1.5123717454977958E-4 7.5E-8 -2.192128961181988E-8-1.189021057748904E-8i 2.77567...
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This document was uploaded on 01/24/2014.

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