H_75nm_L1_65um_D_10um

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Unformatted text preview: 9785885338E-8i 1.297304138149838E-5-3.4036453238246722E-6i -2.2396381610161777E-4 1.5392645669745565E-4 0 -1.313495780661203E-6+1.437815911572015E-7i 1.1948896522567462E-6-1.3213732550246161E-7i 1.6360261319482857E-5-4.3612989719646645E-6i -2.2370743860420126E-4 1.5456622559258346E-4 -1.170833656206905E-6 -1.105832643505389E-6+1.8011451248245435E-7i 1.3859346401412508E-6-1.888370145475271E-7i 1.570532894232812E-5-4.118365127359081E-6i -2.2380112133897135E-4 1.5262473084987925E-4 0 -2.6033032078487393E-6+3.038074481764852E-7i 1.310977235124966E-6-1.7556212466018907E-7i 1.6637330288761852E-5-4.476095637756444E-6i -2.2499999999999997E-4 1.5172175613744607E-4 0 -1.3942379360044773E-6-2.6367827937297846E-8i 1.7662798177228316E-7-1.7864543495298742E-8i 1.87309988187305E-5-4.632952475802219E-6i -2.2499999999999997E-4 1.5343325374892516E-4 0 -1.681647515569996E-7-2.426735159193652E-7i 1.3468906772118317E-7-3.612951715581403E-9i 1.702738615679374E-5-4.311659497589515E-6i -2.2441088233562506E-4 1.5282974444991387E-4 -1.021661838088012E-6 -1.8431768419950125E-6+2.362414149466765E-7i 1.3032408300842573E-6-2.247920556603843E-7i 1.637390150053332E-5-4.291353636970971E-6i -2.2500128590687091E-4 1.539874097798892E-4 -8.548578145562872E-7 -7.675480637012351E-7+4.386004464571611E-8i 7.569981923041813E-7-1.1059548830558152E-7i 1.564021220207268E-5-4.066785622452995E-6i -2.245349102595692E-4 1.511408397648486E-4 -1.0545444267188513E-6 -2.6942804855758715E-6+3.657480328236179E-7i 1.3518737096540612E-6-2.5914398129748064E-7i 1.7435129017101884E-5-4.51912728953903E-6i -2.2315492582781728E-4 1.568691990825837E-4 -1.2405170239620239E-6 -5.631645319500748E-7+1.2024914157849798E-7i 7.889695594532292E-7-1.1901098847320248E-7i 1.4503318712744633E-5-3.768719640305633E-6i -2.2412541861987467E-4 1.5656763892424655E-4 0 7.285007264101751E-10-8.36170173101891E-9i -1.070203152764293E-8+5.7096117167532157E-8i 1.437091864967652E-5-3.713694315205906E-6i -2.2500000000000002E-4 1.5499999999999997E-4 0 2.208816678275274E-7-1.7318853687297822E-7i -2.022463463222265E-7+1.7610013663143748E-7i 1.5360049053748773E-5-4.010956354370559E-6i -2.2643120161470635E-4 1.5414329366203108E-4 0 2.3522168546286082E-8-3.578982143476688E-8i -3.1376367466317105E-8+3.448933805721472E-8i 1.4640315143888703E-5-3.763821207491978E-6i -2.2416333447649334E-4 1.5579989970628563E-4 -1.2048455085420911E-6 -6.630128778194652E-7+1.1997230171349274E-7i 8.278032179708424E-7-1.1081291134001914E-7i 1.4729872814150021E-5-3.837729125375407E-6i -2.2571421296374613E-4 1.5272781970309201E-4 -1.0425705983918347E-6 -9.48319295773307E-7+1.116863127768412E-7i 7.924346892435504E-7-1.482946838683256E-7i 1.5862072915581872E-5-4.078900422185549E-6i -2.269113067232207E-4 1.5267076665306686E-4 0 7.059890382021816E-8-3.192208165858634E-8i -2.7754967546478326E-8+2.603647350496452E-8i 1.5101981373915568E-5-3.89640607099918E-6i -2.260273661504177E-4 1.5436612451065802E-4 -1.2812685525070483E-6 -6.895453018132295E-7+9.885634825633861E-8i 7.35578...
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This document was uploaded on 01/24/2014.

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