H_75nm_L1_65um_D_10um

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Unformatted text preview: 78884E-8-1.6643957926948047E-8i 1.6520767612931675E-6-3.983582687528396E-7i 1.0569596634149516E-4 1.8345022964981106E-4 -9.873772110905065E-6 1.1617715678209822E-7-3.3820507015495575E-8i 1.0654639463195954E-7-1.9439284586531317E-8i 1.492054440568035E-6-3.596997345158526E-7i 1.221032963362337E-4 1.83009135147229E-4 0 2.071836999126738E-9-1.8575486458656835E-9i 2.939765435315371E-9-3.4844406029864556E-9i 1.330879415313778E-6-3.107755511565082E-7i 1.1282292893405232E-4 1.8759355584349534E-4 0 7.112529845912388E-10-1.3731798105147191E-9i 1.4449197279044989E-9-3.8671314022611335E-9i 1.383336235547573E-6-3.3187153983843677E-7i 1.1768860123032269E-4 1.8701312772862903E-4 -1.0601422583440567E-5 1.0865366567071554E-7-3.079192195022624E-8i 9.732995557381955E-8-1.6781585313533538E-8i 1.3278901163747674E-6-3.182955376083985E-7i 1.3219074313157341E-4 1.85759932303363E-4 0 1.7192095370910896E-9-1.5940828222097552E-9i 2.1094057930503424E-9-3.3292999615866514E-9i 1.20923831206988E-6-2.8202556839112753E-7i 9.391281792843988E-5 1.8756506939486282E-4 0 2.409921907108823E-9-1.765335870858992E-9i 3.3010395773873076E-9-4.412800330954583E-9i 1.601711091806306E-6-3.9301088270210367E-7i 8.254643700692977E-5 1.8358064030144297E-4 0 1.4121035416975055E-9-1.4940450184626854E-9i 2.4278742545443114E-9-4.8211885879547774E-9i 1.8040131045152166E-6-4.4636722640933337E-7i 8.673576718737429E-5 1.8589111226216092E-4 -7.841791826865988E-6 1.0813449046317753E-7-3.1648358835141394E-8i 1.0158920204129339E-7-2.3745908126263354E-8i 1.7073643796322775E-6-4.2228885417814117E-7i -8.393986105929255E-5 -1.604061854926388E-4 0 -4.8390385198111066E-9+9.972027473831918E-9i -1.758832762573258E-8+1.9812033936256807E-8i 1.5304435979721395E-5-3.969739949390612E-6i -8.67520824076129E-5 -1.624390010646569E-4 0 -2.4525520611613517E-8+1.4889121758226665E-8i 2.1843274933210834E-8+1.0029738766544808E-8i 1.4917278782219916E-5-3.893184328149642E-6i -7.692040772126749E-5 -1.6227679026857642E-4 0 -2.0734563094012322E-8+1.1167295235858005E-8i 1.085084228198696E-9+1.5314947490617118E-8i 1.2513973334679448E-5-3.282732877323154E-6i -7.460275358734495E-5 -1.6118433916318282E-4 -4.0382321426617035E-6 8.990347405817464E-7-2.2308077689096872E-7i -1.381572332975452E-6+3.547089803781755E-7i 1.2147608652332784E-5-3.1968732399264197E-6i -7.889721441982856E-5 -1.60155065648934E-4 -2.1828611771153426E-6 6.494528779615408E-7-1.5320151335619184E-7i -1.094218346566472E-6+2.6976097436375257E-7i 1.3802953165003204E-5-3.600064982253968E-6i -8.038104471725792E-5 -1.6097009245679683E-4 0 -1.6697008842782427E-8+1.1512789265482654E-8i -2.1904144080139853E-8+2.0281342308154194E-8i 1.3971734895204617E-5-3.639629600684998E-6i -7.801895496326746E-5 -1.6216827967935273E-4 -3.1492218744917105E-6 7.267609720796774E-7-1.791269120936119E-7i -1.2305341067745008E-6+3.136536441156821E-7i 1.264792290251745E-5-3.3217099894358726E-6i -1.06603831832709E-4 -1.6098502958986104E-4 0 -9.313675198025709E-11+1.2614796734189164E-8i 9.697326747069383E-8-1.21...
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This document was uploaded on 01/24/2014.

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