H_75nm_L1_65um_D_10um

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Unformatted text preview: 35E-8-9.849487422987147E-9i 2.315961073830722E-7-5.991369192688451E-8i 1.4046836575143205E-4 2.709245354458585E-4 -3.9821726049097956E-5 1.5514784707389942E-7-4.0932499525828044E-8i 1.524009350305577E-7-3.794044348820874E-8i 6.628302155107145E-7-1.6928104806904315E-7i 2.2128384326030993E-4 3.3458826864492063E-4 -1.1937751430318005E-4 1.5633112127472266E-7-4.064171945776348E-8i 1.4644241844100303E-7-3.691428230039939E-8i 2.5697598310002236E-7-6.646539005338166E-8i 1.6971099363225707E-4 2.756660177640781E-4 -1.0583959073795152E-4 2.87943403897445E-7-7.505392355473678E-8i 2.5642775690553575E-7-6.357968724881987E-8i 4.1605184729034114E-7-1.0763075659346479E-7i 1.6435582986822018E-4 3.0209721932585655E-4 1.1107662790774713E-6 -1.0642524204917574E-9+1.0223094875844256E-10i -2.9520201294944465E-9+5.625895141964891E-11i 5.146555340050378E-7-1.3199805589131978E-7i 1.0730207628529158E-4 2.453533000272057E-4 -2.0306417512088484E-4 5.646675948278632E-7-1.4848462421582916E-7i 5.591468502701342E-7-1.422052327997236E-7i 1.1768245258378798E-7-3.203881510078161E-8i 1.1137216766695163E-4 2.6301607673450886E-4 -1.478836559924056E-4 4.91656133136086E-7-1.2948048747187778E-7i 5.099288457743539E-7-1.2919179865272808E-7i 3.5784773829222334E-7-9.363935777605731E-8i 4.619974137932644E-5 1.6555666643642056E-5 2.7196319175221387E-5 -5.234600504197688E-6+1.2942605347127279E-6i -7.993194088424703E-7+1.8495212107743098E-7i 7.274916945605574E-6-1.8156505756594958E-6i 4.775371219161732E-5 1.946288409763207E-5 1.427322895252339E-5 -2.830831718055516E-6+7.008237845071767E-7i -4.928855825133864E-7+1.066897536374787E-7i 8.375733789134053E-6-2.0572022071728655E-6i 3.697687648636561E-5 1.9146447180727526E-5 1.201360702358022E-5 -3.6574906925656937E-6+8.852450684248319E-7i -8.078433775379899E-7+1.7696135388245984E-7i 1.1087065972278866E-5-2.722666405938595E-6i 7.084848430125778E-6 1.1294645894047687E-5 7.958410666310427E-6 -1.8397987902393066E-5+4.309936776951351E-6i -5.30565293373976E-6+1.2290432546658488E-6i 3.571232680446353E-5-8.58167360105147E-6i 1.4721206788712781E-5 1.275341012842714E-5 1.1343848717832065E-5 -1.2649277594902611E-5+2.990282175540754E-6i -3.1133140117616046E-6+7.143408076395009E-7i 2.3031260915071727E-5-5.5949881385939714E-6i 1.1724183727808136E-5 1.5732168978909537E-5 8.462817152778922E-6 -1.120310355913327E-5+2.6378145252682096E-6i -3.825826919804255E-6+8.828135100293166E-7i 2.7061341271770494E-5-6.543198986629247E-6i 9.125838708189442E-6 6.703175201397881E-6 2.5074778963576636E-5 -2.7066554007159072E-5+6.4138326341966666E-6i -3.88699344178375E-6+9.043931351341315E-7i 1.2129586640431762E-5-3.070140665943967E-6i -1.9917091661531307E-5 3.950658528768002E-6 8.587199912960957E-6 -3.5647875362405636E-4+8.277808752038463E-5i -2.3490809584723253E-4+5.45461573571305E-5i -4.547935830963365E-4+1.0522821891167296E-4i -3.167195883895917E-5 8.362128679588651E-6 7.77103301371761E-6 -5.814458555779037E-5+1.3579530020809475E-5i -5.807905793001343E-4+1.348400775112869E-4i -2.389774674424751E-4+5.4...
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This document was uploaded on 01/24/2014.

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