H_75nm_L1_65um_D_10um

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Unformatted text preview: 505736E-4 7.500000000000004E-8 6.078440206341305E-6-1.166071205696097E-6i 3.878251896479353E-7-1.0353839694869175E-7i 4.877748774712623E-5-1.1544989891309503E-5i -2.2499999999999997E-4 -1.30942803935916E-4 0 9.088971778757895E-7-5.319664367076184E-7i -3.3993229753281895E-7+5.8650390988290724E-8i 4.8509832930365704E-5-1.1451083467968933E-5i -2.25884674833489E-4 -1.306332688484138E-4 8.248337696575197E-8 3.1168257865477056E-6-6.333790094903424E-7i -1.1822913122301604E-6+1.9729435996040934E-7i 3.784270398983014E-5-9.333580517316875E-6i -2.2346540898066065E-4 -1.3004740308252439E-4 7.500000000000002E-8 2.6342547346902556E-5-5.434290530869335E-6i 1.4718826300760823E-6-3.886621474177629E-7i 3.460318239866744E-5-9.176408112266004E-6i -2.25E-4 -1.3442570757409125E-4 7.500000000000002E-8 5.689710324926226E-6-1.052164163946484E-6i 2.2400920438730987E-7-6.606505680017971E-8i 4.2796063125222526E-5-1.0039460898830938E-5i -2.259078284344725E-4 -1.338801631201111E-4 4.3007715227137585E-7 3.828637951088153E-6-7.879093465921829E-7i -1.320571997626934E-7-2.4357063937203398E-8i 3.277080191050568E-5-8.11640649698932E-6i -2.25E-4 -1.3615209179836772E-4 7.500000000000001E-8 6.2885290363680205E-6-1.1425761481654147E-6i 3.03106762784238E-7-8.569909810367854E-8i 3.901917847566862E-5-9.181792225209868E-6i -2.25E-4 -1.361321088147338E-4 0 1.744271140093431E-6-6.482749491589016E-7i -6.879589387054352E-8-8.100057513615866E-9i 4.074018393018797E-5-9.43531631425465E-6i -2.2594035095038233E-4 -1.3577289116663863E-4 1.591265559421017E-7 1.8073639529436747E-6-3.855891406501222E-7i -5.9282524311754516E-8-1.4223580113714718E-8i 3.1958472366849786E-5-7.816117719257332E-6i -2.257233734372208E-4 -1.3528354217486098E-4 8.326806325777725E-8 1.1852075479157342E-6-2.0425248474786884E-7i 8.255721210548295E-8-2.6687494092403342E-8i 3.51895793411619E-5-8.47930546837572E-6i -2.2630029090085795E-4 -1.3178757810771645E-4 0 -4.854685967898711E-7+1.0377185228109951E-7i 2.0235735002682065E-8-1.7247377260048012E-8i 3.3097157186225955E-5-8.293784689106934E-6i -2.267841673102534E-4 -1.2820314090901402E-4 0 -2.3470236037869007E-6+4.5767841959828043E-7i -2.4414674974462506E-7+3.867226058212263E-8i 3.4374778767096356E-5-8.72799328483517E-6i -2.2499999999999997E-4 -1.292130356429767E-4 0 2.517745475042961E-6-8.367669249067851E-7i -2.9094771453186397E-7+3.981803525787697E-8i 5.06213782931475E-5-1.2051671890667137E-5i -2.2675805598095598E-4 -1.3016831244352806E-4 0 -1.570152837649293E-6+3.107029883352615E-7i 5.180310409339898E-7-1.079739901192293E-7i 3.138245786467898E-5-8.020966167590163E-6i -2.1518150944852205E-4 -1.362929764849233E-4 7.500000000000001E-8 1.6736048381204354E-5-4.0497101563644515E-6i 9.329617336598558E-6-2.399215129604675E-6i 1.6906056080861428E-5-5.4882961791221805E-6i -2.1890965871182436E-4 -1.359795620555784E-4 7.500000000000001E-8 1.7925759309020406E-5-4.013578150057391E-6i 5.8379404546150815E-6-1.4724108183504503E-6i 1.9811548759666384E-5-6.063433589088553E-6i -2.1766312497860805E-4 -1.3616...
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This document was uploaded on 01/24/2014.

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