H_75nm_L1_65um_D_10um

968381401913872e 6 6685762917194677e 8

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Unformatted text preview: 66E-7i 1.5721334929141604E-7+7.434235797503568E-9i 2.713352115910974E-6-7.916350257773515E-7i 9.176894177691416E-5 1.0769531352651461E-4 -5.091148354698108E-6 -1.6735646958405755E-7-1.7677859322595427E-7i 1.6721161735001968E-7+1.8643324050020843E-8i 2.4686391242426165E-6-7.830567936689196E-7i 7.570134104330861E-5 9.200455530137855E-5 -1.9312670138917916E-6 -3.1615640976237247E-7-2.384991502410218E-7i 5.873136936669892E-8-7.786371697451685E-9i 3.998167450491545E-6-7.452172655269517E-7i 7.422911881027257E-5 9.188505791808159E-5 -1.2682973681800442E-6 -1.3668102490874828E-7-1.438150358987101E-7i 3.871050182411335E-8-8.515123552818384E-9i 4.16759534680842E-6-6.950985969643839E-7i 7.500000000000001E-5 1.0148105717259042E-4 0 -3.008849870329543E-7-2.479409323470186E-7i -7.087923143087964E-9-6.469325614562778E-9i 4.306848174898764E-6-4.785553093573839E-7i 7.563751175927728E-5 1.0050307447904085E-4 -1.0242736008390988E-6 -4.2454115936773627E-7-2.5971921963105937E-7i 3.520842199621958E-8-4.033760261762288E-9i 3.9131241634614885E-6-6.596371877946674E-7i 7.500000000000001E-5 9.974861646466983E-5 0 -2.6484501549215326E-7-2.527661836865509E-7i 6.791207267375921E-9-1.3602435386395051E-9i 4.407343831136186E-6-4.611474454008495E-7i 7.50796348669356E-5 9.720824175662779E-5 -1.346363580918814E-6 -2.7750209537770525E-7-2.1348816654168795E-7i 4.0561086403198154E-8-7.613445463107185E-9i 4.0209891435476375E-6-6.668863726682391E-7i 7.538614339937081E-5 9.91994881527338E-5 -1.0453863797492307E-6 -3.631388743817887E-7-2.431844292817541E-7i 3.308128540193881E-8-4.772452614029541E-9i 4.004714724551838E-6-6.479633241216693E-7i 7.494511040374429E-5 1.0206330971108131E-4 -1.5166838032763759E-6 -2.3318385659503965E-7-1.9024082747033481E-7i 4.6230539914737205E-8-6.88348448652549E-9i 3.8608009553608146E-6-6.611509661539032E-7i 7.434771862948067E-5 1.0034867416085524E-4 -1.416230363038396E-6 -1.541389076899088E-7-1.449387835860756E-7i 4.474224142030235E-8-7.655033968594843E-9i 3.918818525007935E-6-6.70777441915312E-7i 7.432617913569566E-5 1.0402974894672472E-4 -2.0365768073985446E-6 -1.5177196399273163E-7-1.5365424662678268E-7i 6.111554012925588E-8-9.056429845840647E-9i 3.7452750753133356E-6-6.989982545356646E-7i 7.425537853275816E-5 1.0535265856749713E-4 -1.1769402192549965E-6 -1.1658227209535947E-7-1.2239711087559515E-7i 3.420040822765813E-8-7.478323105831247E-9i 3.8116533082564277E-6-6.319479819662398E-7i 7.49108728929069E-5 1.0640071811199745E-4 -2.0196055258012556E-6 -1.9513202837698943E-7-1.7567934763026182E-7i 6.156586028536278E-8-8.222756427412197E-9i 3.6760138124405073E-6-6.753946429664708E-7i 7.379347380301439E-5 1.1246797370822603E-4 -1.56346910935889E-6 -8.582234130406648E-8-1.0429379570786139E-7i 4.6813993746359514E-8-8.105117912113671E-9i 3.5734261404593514E-6-6.47924703968232E-7i 7.384376233373293E-5 1.1444772668675265E-4 0 -6.493959772702063E-9-1.8747917064758243E-8i 4.687689324543215E-9-4.375685839626528E-9i 3.6025056369292827E-6-5.834337429644049E-7i 7.4731077649...
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This document was uploaded on 01/24/2014.

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