H_75nm_L1_65um_D_10um

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Unformatted text preview: 62E-9-1.125867636157333E-8i 2.672398075778553E-7+2.0603012044151416E-7i 7.932565591986003E-6-2.034363774757532E-6i 5.565005215074329E-5 -6.208164089800299E-6 7.500000000000002E-8 4.1942329725022186E-9-1.0103938878401424E-8i 1.9433621995881573E-7+1.7131730746726242E-7i 7.718399121647088E-6-2.057034988570267E-6i 6.248370784437246E-5 -1.0884945509506221E-5 1.8918957753639259E-6 -2.3269941557337397E-7+5.692448436795929E-8i 6.538887391743242E-8+6.251626762340573E-8i 6.814369252832732E-6-1.5557982757095572E-6i 6.14879574088227E-5 -9.427166220233356E-6 2.0475936800435274E-6 -2.651496760292428E-7+6.404524273268372E-8i 1.3314081644603618E-7+1.0319183262607666E-7i 6.932293146130905E-6-1.6254644546327304E-6i 5.736363775521425E-5 -1.1373929625927413E-5 0 1.2181498296143826E-8-8.557301960928768E-9i -3.2084747545729194E-8-5.715805763119206E-9i 7.553943525592371E-6-1.7024598739600771E-6i 5.990107474562327E-5 -1.3829227970087638E-5 0 1.4491109658846395E-8-1.12870016468836E-8i -5.4544231951154584E-9-1.3413489065566136E-9i 7.0988763927281805E-6-1.6516165802032968E-6i 6.010893051130523E-5 -1.1737362356816615E-5 2.3425671470065757E-6 -3.182068899310797E-7+7.775679541611813E-8i 6.516420799058539E-8+3.5510178065667925E-8i 7.101497960053684E-6-1.6573709785785713E-6i 5.740811633906221E-5 -1.3446809299147032E-5 0 1.3350404799073537E-8-1.1104744841279716E-8i -6.129755460760183E-9-5.732854648406634E-9i 7.477140945449657E-6-1.7427685765730947E-6i 5.853833460700051E-5 -1.0494495161834137E-5 1.6197559740581957E-6 -2.299830605934111E-7+5.172781873875718E-8i 7.063630119983988E-8+8.116444322973232E-8i 7.39180274906072E-6-1.6901939704425106E-6i 5.965307567703623E-5 -9.068058141744044E-6 2.3787189123071326E-6 -3.3471853936430836E-7+7.87246320035354E-8i 1.3087175359874802E-7+9.921011825151629E-8i 7.18197576651322E-6-1.7103472283488314E-6i 7.24083362339883E-5 -1.9338692242401016E-5 1.4997872098373767E-6 -6.868677510439215E-8+6.48375584535959E-8i 1.083364092609587E-8-2.5623543568642343E-9i 5.6636127680687156E-6-1.193818073516237E-6i 6.86687541092195E-5 -1.927464758472554E-5 0 8.507279757909159E-9-1.3867035654133163E-8i -3.09527155937378E-9+1.1543362651161847E-9i 5.97002498041164E-6-1.3427275138875644E-6i 7.104729187683397E-5 -1.809456843303089E-5 0 3.6576814389571373E-9-1.893715643659123E-8i -1.6685697492636354E-9+2.291895828307987E-9i 5.787068041120639E-6-1.2509982352768032E-6i 7.351221781029526E-5 -1.7888080137434322E-5 2.8809524768369156E-6 -1.3550152542357996E-7+1.3737663140200166E-7i 1.504569245271926E-8-7.834142050554589E-9i 5.552794167880409E-6-1.1803169709240726E-6i 6.920306525844094E-5 -1.6459718694128054E-5 0 1.1428893892948335E-8-1.276634148412309E-8i -3.9051113645967E-9-5.902468306056164E-11i 5.959817888939577E-6-1.3271298595669024E-6i 7.058536330394384E-5 -1.650469722867262E-5 1.9439883180386396E-6 -1.5035010490450106E-7+6.40444873107933E-8i 2.009695596183227E-8+1.7744430350399793E-10i 5.820620571855578E-6-1.2800474588563234E-6i 6.71491064272524E-5 -1.729505663719983E-5 0 9.93608...
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This document was uploaded on 01/24/2014.

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