H_75nm_L1_65um_D_10um

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Unformatted text preview: 8394E-5-5.660385914551397E-6i 1.8082704227259743E-5 1.880313169573493E-6 -7.31270458191419E-7 7.539701551586483E-7-2.757847485372033E-7i 1.5788384450135406E-8-1.6647646943585784E-8i 2.5096826693236163E-5-6.336357046452026E-6i 1.7895121905617183E-5 1.4498694270933748E-6 0 -1.226366054540231E-7-1.0767860952292413E-7i -2.1715313876558206E-8-1.7386515518721153E-8i 2.5262766291659283E-5-6.463172591590386E-6i 1.8474287709546396E-5 2.632789704313306E-6 0 1.5396511863878526E-7-4.4925044730657894E-8i 4.764892399568288E-8-9.996945191234272E-9i 2.450626543534699E-5-6.279141056047302E-6i 1.6695093723658515E-5 1.5553844990069935E-6 -7.698758543677579E-7 7.936840996368904E-7-4.4391528715866375E-7i -1.5004537434825226E-8-4.5259694918580693E-8i 2.69328875493814E-5-6.6985576267655864E-6i 1.7093637537185537E-5 4.96196056143393E-7 0 -3.1696381846934104E-7-2.24524336309712E-7i -2.027475261984213E-8-1.3999470097194678E-8i 2.6347806737381007E-5-6.6715510209740044E-6i 1.6449966332384484E-5 6.701698540433752E-7 -7.084152552387039E-7 7.02309510880312E-7-4.782970944226672E-7i -1.2015463188620327E-8-2.536255176677206E-8i 2.7376485681965528E-5-6.753785907252405E-6i 1.6631059296144276E-5 -8.34174167722953E-8 -7.15628433239052E-7 6.912647840266489E-7-4.627118271436313E-7i 1.6434372023953376E-9+3.1787602783068385E-9i 2.7101102497602762E-5-6.7095954440012046E-6i 1.2248958189320882E-5 4.7107282657646505E-6 -3.806727445205162E-7 8.213692590806646E-7-3.906820954358961E-7i 2.802808847106856E-7-3.4796928532079717E-7i 3.4370476679929224E-5-8.194976633423001E-6i 1.2184168201197623E-5 4.2356438162586435E-6 -3.3707746556307385E-7 9.73596363312691E-7-3.6517719564227447E-7i 5.922933259264069E-7-3.172351853708566E-7i 3.378825962726709E-5-7.921688903817334E-6i 1.2449825733838645E-5 5.625079912394137E-6 0 -2.7426905382007166E-7-1.6104553478279993E-7i -3.102925899984195E-7-1.7444395531788595E-7i 3.33493719100519E-5-8.264074443230823E-6i 1.2582682434094328E-5 4.977812811371222E-6 -5.130779105560537E-7 8.853393829876336E-7-4.1985533370562584E-7i 9.272238554647771E-8-2.6028226677319916E-7i 3.346264007040259E-5-8.099864799552973E-6i 1.3183394145434802E-5 5.563869428215837E-6 0 -2.7387216507759883E-7-1.7356617072403213E-7i -2.545291794044576E-7-1.5202978417283575E-7i 3.19136620517363E-5-7.958818041931777E-6i 1.2708000221396748E-5 5.446307219936489E-6 -4.6086739526030063E-7 6.817878336387141E-7-3.6603862818292917E-7i -3.4012574205691414E-8-1.854958781130314E-7i 3.2945868824524075E-5-8.085597038365774E-6i 1.0918241296889287E-5 -4.270189263378928E-6 -7.191006192383224E-7 1.7259857856801275E-6-4.977509688245598E-7i -4.2630276377036097E-7+1.9348158619797692E-7i 3.641712994644636E-5-8.669470261766056E-6i 1.3035822349738462E-5 -5.253484471627082E-6 -8.322126027858482E-7 1.3730518257913861E-6-5.164921134569294E-7i -1.1561263184600914E-7+1.7661191907851134E-7i 3.2321863882986716E-5-7.898935148520648E-6i 1.355844981941484E-5 -5.124491650369391E-6 -4.846655656496337E-7 6.236771742939165E-7-3.807962616741295E-7i 6.663700024643885E-8+1....
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This document was uploaded on 01/24/2014.

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