H_75nm_L1_65um_D_10um

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Unformatted text preview: 81808017E-6+5.809264495710617E-8i 2.2586838877605876E-4 -4.828765924760187E-5 -1.846006545150026E-6 1.30803493654164E-7+5.600236043560662E-8i 2.9474540952269717E-9+1.4898448227467246E-9i 1.0702761949202803E-6-7.854923033717488E-8i 2.2638353952194045E-4 -4.880361159503659E-5 0 -3.3675385642192596E-9-1.2927386067217508E-8i -1.1364183385282039E-9-6.349429629531715E-10i 1.123830361177888E-6-4.460596074794835E-8i 2.268194681963393E-4 -4.688027746138125E-5 0 -1.1371339804456745E-8-1.7281345481793414E-8i -1.0293501162116775E-9-7.110374699327108E-10i 1.083785965466245E-6-6.665066108133907E-8i 2.264259358363056E-4 -4.6297446253053343E-5 -1.7550490389922577E-6 1.030184865921173E-7+4.138161733908775E-8i 3.0523682221016697E-9+1.632713459277877E-9i 1.0569587861876352E-6-8.286852028046965E-8i 2.2761442563656444E-4 -4.7675380877270756E-5 -1.4827455081277647E-6 6.307333959896215E-8+2.0397597688136845E-8i 7.608787632761081E-10+5.761436050954419E-10i 1.0276061837407775E-6-9.274814995568462E-8i 2.2523639571224446E-4 -2.9827498493313364E-5 -1.597728864482157E-6 1.267877373787646E-7+6.81987212624721E-8i 6.277897259697001E-9+8.873181647968722E-10i 1.0654321301871404E-6-7.65654331498823E-8i 2.2500000000000002E-4 -3.062028018451998E-5 0 1.1086498900127561E-7+7.77912962537365E-8i -1.4366114687561129E-9-9.007886086348504E-10i 1.2412038928382295E-6+3.7131627073550877E-8i 2.25E-4 -2.8890257015509244E-5 0 1.0875861008198077E-7+7.882431325299984E-8i 3.833576341463231E-9+1.3498497191972297E-9i 1.230271746367499E-6+3.638337004393592E-8i 2.2499999999999997E-4 -2.7160233846498454E-5 0 1.0944156637731687E-7+8.296745956880171E-8i -1.063810354216821E-9-1.3701374694530255E-9i 1.2284622140423137E-6+3.9231640952734594E-8i 2.2620023331424845E-4 -2.7193025339445327E-5 -1.1900975128440522E-6 6.724704872045743E-8+3.1304626396656895E-8i 4.314404908386448E-9+7.828961133203399E-10i 1.0477240841368448E-6-7.781172122817023E-8i 2.3107881430387507E-4 5.9904315434851254E-6 0 1.7218495963567571E-9-4.166846090337686E-9i -1.2522765808020542E-10+2.1357428205407486E-10i 9.144775338753817E-7-1.1409096317061974E-7i 2.3062365611519758E-4 7.078363123919929E-6 -1.5928617778288698E-6 2.616461918370901E-8+1.4065714185963613E-8i 1.7274698363375777E-11+3.894014775650412E-9i 9.180606089519675E-7-1.1668987729116509E-7i 2.31817938060072E-4 4.717527868539254E-6 -1.496682790115806E-6 2.2337156982905278E-8+1.037170843081473E-8i 8.043608559956413E-11+2.139324612081937E-9i 9.023563371254923E-7-1.225450229719705E-7i 2.3255299409922424E-4 6.383957617911044E-6 0 1.9988801396963844E-9-3.175726914638807E-9i -1.9607974524105988E-10-6.787698702016862E-11i 8.943449289506672E-7-1.2744980748266903E-7i 2.285553096271402E-4 -8.45603681151239E-6 0 2.8337128639211943E-9-4.667906783947019E-9i 3.9587608293655967E-10-9.43162870245257E-12i 9.569603856098513E-7-8.456514370793593E-8i 2.2812278180315122E-4 -6.379968733466208E-6 0 5.461254719439198E-10-9.914460338928421E-9i 2.2521998354330008E-10-8.855769023867404E-10i 9.700405560869225E-7-5.674962004...
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This document was uploaded on 01/24/2014.

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