H_75nm_L1_65um_D_1um

0403900871183803e 7i 23723527782875566e 7

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Unformatted text preview: 4570618E-4 0 -7.121679992823497E-8+2.724512351963289E-8i -4.1733085819049704E-5+1.0759712951347127E-5i -3.1815977760325456E-5+9.50195998079667E-6i 1.453217305247082E-4 1.511018164886403E-4 0 -3.588741371214751E-7+1.0590766845721897E-7i -4.1579743315603956E-5+1.0749033960419375E-5i -3.124851094121358E-5+9.355996753184999E-6i 1.3568213096351784E-4 1.503983843397773E-4 -2.3674562165318056E-6 4.7657062430577775E-7-1.5230481273069188E-7i -3.447387145650736E-5+9.13042534807482E-6i -2.8096367491368377E-5+8.221078510542492E-6i 1.3379205653477088E-4 1.4819236650771595E-4 0 7.681730802250146E-7-2.5158935846713443E-7i -4.0634756452201216E-5+1.094975660965773E-5i -2.3736301072744207E-5+7.435361532653767E-6i 1.3640674817372344E-4 1.490314337731428E-4 0 4.442264174583778E-7-1.454711890865971E-7i -4.106552565341532E-5+1.0955336502924283E-5i -2.562405525713567E-5+7.935211437117256E-6i 1.4179792853907206E-4 1.5193855237316103E-4 -1.7331993473289906E-6 -8.166225734542492E-8+2.4223245807501522E-8i -3.4618836120987...
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This document was uploaded on 01/24/2014.

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