H_75nm_L1_65um_D_1um

120576963891533e 10i 5303954401122897e

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Unformatted text preview: 4561921E-9-2.238186905309133E-10i -5.3769331691095756E-8+1.3971584868456277E-8i -6.716729652787213E-4 3.59012516803428E-4 0 1.4332893894726628E-10-4.639776337775105E-11i -6.801655230185227E-11+2.6665198398806754E-11i -1.0075370966142649E-8+2.6695813491701255E-9i -6.836671253729845E-4 3.6542345460348883E-4 0 2.6769916572526708E-12-2.4668183192956773E-12i -1.2755917588496405E-12+2.1345833103139194E-12i -1.8955175411950505E-9+5.131465130078043E-10i -6.62564686183983E-4 3.9698732424603216E-4 -6.591009793571707E-5 4.244733467013559E-10-1.1334570905779015E-10i -2.4146989376706066E-10+6.423135216571802E-11i -1.8615399719289842E-9+5.036248997066876E-10i -6.956612854672475E-4 3.7183439240355033E-4 0 1.0458120152619889E-12-8.674091066993929E-13i -5.37843744578782E-13+5.99300029139796E-13i -3.014606855177835E-10+8.470843003908954E-11i -6.741886280468599E-4 4.0395201414508534E-4 -6.706641544336126E-5 6.87850567555344E-11-1.867037166444598E-11i -3.9923411969927075E-11+1.0635928799301968E-11i -2.952624589007563E-1...
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This document was uploaded on 01/24/2014.

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