H_75nm_L1_65um_D_1um

154777119535382e 7i 4904447712336137e

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Unformatted text preview: 173873E-5 -2.8182463594005167E-7-5.933766013471999E-8i 7.589432907128989E-8+1.1887220990065958E-8i -9.319454409409019E-7+2.3735046377749806E-7i -2.3151076819865704E-4 8.023942980818414E-5 1.3496834415866098E-5 -1.4182170458867567E-7-5.603578307252521E-9i 2.2917986112378077E-8-2.5844221223772236E-9i -8.748646760583204E-7+1.7189282668402132E-7i -2.192713489292165E-4 7.975266626236699E-5 1.6669578498494722E-5 -2.4724153497448747E-7-2.838609205701816E-8i 3.506581779176083E-8-2.4804582993391036E-9i -9.495323661656547E-7+1.9824256315541023E-7i -2.121004218944886E-4 8.869397570406534E-5 1.7294674861824983E-5 -2.952476044234497E-7-4.0699307711875984E-8i 5.158786707904972E-8+7.746866740966966E-11i -9.527856362312981E-7+2.2539257091867202E-7i -2.1903041980073312E-4 6.832346999030673E-5 1.69187490702831E-5 -2.539043262374374E-7-2.728628720750586E-8i 2.5726885654172567E-8-4.141168593027745E-9i -9.668115320594322E-7+2.0485595821738325E-7i -2.2625615654637358E-4 9.182914816629381E-5 1.4387918260389157E-5 -1.710074832251127E-...
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This document was uploaded on 01/24/2014.

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