H_75nm_L1_65um_D_1um

327192937662259e 8i 4797016316167302e

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Unformatted text preview: 558270277657294E-5 2.7076913085753295E-6 -8.518993936935508E-7 1.4044786205658894E-7-5.596575152729827E-8i -2.9463604771272624E-8-5.435071270376134E-9i -7.632620201915634E-6+1.939963948970981E-6i -6.991778228458774E-5 3.2159838055550766E-6 0 1.1166643074252464E-8-7.574289474387286E-9i 7.604747800698418E-9+2.213565742421794E-9i -7.04643173771471E-6+1.7164046714653676E-6i -7.111322753321146E-5 1.6419684991997192E-6 -1.6495508667823517E-6 2.0828425189103628E-7-8.346593507092864E-8i -1.8769252235241896E-9+6.142212340439056E-9i -6.895287300923794E-6+1.664981989962771E-6i -7.096416613362795E-5 3.572075227358982E-6 -2.319849154947596E-6 2.760072118269127E-7-1.2319574329410284E-7i 1.9688756809602853E-9+1.4879980234868684E-8i -6.914239870393824E-6+1.6745365067546624E-6i -6.869993382232273E-5 1.616021000635983E-6 0 1.1640422176118203E-8-9.398332848966824E-9i -4.691151995428191E-9+3.4578070467312833E-9i -7.2075891087801285E-6+1.7759466153489708E-6i -6.694453453930801E-5 1.5542033588373374E-6 -1.287362989...
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