H_75nm_L1_65um_D_1um

530101570127473e 9 6655221624060241e 10i

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Unformatted text preview: 29859883483E-9i 0 -7.418202729867565E-4 -2.2502826955211633E-4 9.40563644431574E-11-3.128378989432683E-11i 1.8760896442862323E-9-4.86530483774619E-10i -1.545971059242627E-9+4.025758067010058E-10i -6.673355791598175E-5 -7.481391880261082E-4 -1.9175355951718366E-4 2.1978553093638517E-10-6.253434501531306E-11i 1.5860164229445676E-9-4.117443334405882E-10i -1.6826563247472334E-9+4.4025624004571294E-10i -6.907508626391094E-5 -7.743896858515857E-4 -1.9848175458796202E-4 1.9912678418745994E-12-7.985555640074385E-13i 1.7973723133406918E-11-4.678851378859387E-12i -1.668314488831873E-11+4.449357166768055E-12i -7.024585043787553E-5 -7.875149347643243E-4 -2.018458521233512E-4 1.8078139267168122E-19-1.9106548995206435E-19i 5.297341293488424E-19-1.4519949917828185E-19i -2.15900586197985E-18+6.084569768101868E-19i 0 -7.548346637409097E-4 -2.2897613393022356E-4 9.055324524590813E-12-4.408092546243549E-12i 2.8331623831262554E-10-7.332746693789709E-11i -2.302083658021981E-10+5.997858479329956E-11i -6.790432208994...
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