H_75nm_L1_65um_D_1um

554887703014268e 1024746215059978474e 10i

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Unformatted text preview: 05683E-9i -5.117428942405377E-8+1.3351714133273508E-8i -6.237640363830404E-4 4.1758460335059977E-4 1.287481493445989E-4 -4.2485472385067085E-9+1.0976660503818127E-9i 2.5812506636379714E-9-6.516459423336796E-10i -9.401474655405095E-9+2.4973737372652252E-9i -6.571799669035604E-4 4.3995520710152464E-4 1.3564537163091668E-4 -1.0319163164745366E-11+2.8624259079119943E-12i 6.707362550091309E-12-1.7153885881863717E-12i -1.9424472009356507E-11+6.0361692442126014E-12i -6.683186104104004E-4 4.4741207501849966E-4 1.3794444572635595E-4 -4.210905764524643E-19+2.1039542133140432E-19i 2.272539803118463E-19-6.05039030589184E-20i -2.6059836164965478E-18+1.1405202269232553E-18i -6.204410624145758E-4 3.7291814112691676E-4 1.8838510580276039E-4 -3.41783898303484E-8+8.703123940340363E-9i 1.7203485671460353E-8-4.287396283283886E-9i -4.634979971111601E-8+1.2142210445190134E-8i -6.317218090039318E-4 3.79698470965588E-4 1.9181028954462875E-4 -6.3554064676177635E-9+1.6452888210532058E-9i 3.4812474640864823E-9-8....
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This document was uploaded on 01/24/2014.

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