H_75nm_L1_65um_D_1um

6766651003699573e 4 0 8549469019539494e 10

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Unformatted text preview: 1.017645997315166E-6i -6.222167169919393E-5 1.0497371352555488E-4 0 -4.142080597485881E-9-1.474488654578613E-8i -6.51873664867398E-9+4.842613552779457E-9i -4.751607464485712E-6+9.379400907213036E-7i -6.21786165756279E-5 1.025295338820641E-4 0 -2.9485754795976824E-9-1.4793678130599341E-8i -7.15036985527445E-9+4.640875245563458E-9i -4.838827763534927E-6+9.626074377054091E-7i -5.995689649458744E-5 9.628458083597403E-5 0 2.144414154139654E-9-1.1062112638783216E-8i -6.110677651383067E-9+5.373677761604851E-9i -5.13900581685702E-6+1.0953420580945712E-6i -7.049135518057358E-5 4.5604878525871936E-5 2.129165416940116E-6 5.428904985187784E-7+4.266754859924222E-7i 4.1747456944856335E-8-1.8349565961891292E-8i -6.026712680297811E-6+1.4480862938607327E-6i -6.96320306538222E-5 5.0316312591186806E-5 7.5E-8 1.0083989732472046E-6+4.941737987318161E-7i -1.0110445871572976E-8+3.975227914204682E-9i -6.0132162484945605E-6+1.4166326107501398E-6i -6.935468357561849E-5 4.9635851156016296E-5 1.7094665327297786E-...
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This document was uploaded on 01/24/2014.

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