H_75nm_L1_65um_D_1um

7465643929679326e 9i 11792983438287664e

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Unformatted text preview: 91524E-7+2.326542639556896E-8i -2.017114129804105E-6+8.496586373259676E-7i -1.1661049830812917E-4 -9.471232113026144E-5 0 -5.5268631801358127E-8-6.9937304158278865E-9i 1.523721437995812E-7+7.019300402642716E-8i -1.8332288916162162E-6+8.360304903640316E-7i -1.3086819815370194E-4 -7.201451797555499E-5 -8.036014274622175E-6 2.51922765276467E-7-2.5586046598867338E-8i 6.487973396453628E-8-7.081310948867365E-11i -1.7512513947198634E-6+7.532133004268625E-7i -1.402758486524269E-4 -7.046364744292523E-5 -7.769168465116397E-6 2.709489250627878E-7+3.1376808151467248E-9i 3.9259525067583217E-8-9.5737716822303E-10i -1.562397425485493E-6+6.857463876353174E-7i -1.4665325418278938E-4 -7.476527016623854E-5 -1.2781479481264246E-5 3.603629399373847E-7-1.4728311996311949E-8i 8.478568252461236E-8-1.418036471816947E-9i -1.459642544974245E-6+6.121869027797105E-7i -1.4896779520364947E-4 -3.4986842632277864E-5 -7.907239166019884E-6 2.871704533496999E-7+5.78713070173177E-9i -2.0960532571692497E-7-7.913662979322631E-8i -1.6949...
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This document was uploaded on 01/24/2014.

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