H_75nm_L1_65um_D_1um

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Unformatted text preview: 27072158E-9i 4.732961615851507E-10-3.419833738930947E-10i -4.686857855607882E-7+1.1206456882351207E-7i -3.0000000000000003E-4 -8.638924975326592E-5 0 2.326226590274887E-9-1.3831480234438745E-9i 5.766504406230462E-10-2.4644298399407495E-10i -4.922071406695502E-7+1.1655436581754905E-7i -2.8419507936946185E-4 -9.02547820638154E-5 1.705867333144241E-5 -6.878424026250562E-8+1.1889281727917478E-8i -1.518549871682054E-8+2.623220475097679E-9i -5.443157079454004E-7+1.275374664301224E-7i -2.759129122735218E-4 -7.711275899120883E-5 0 1.6914699292438207E-9-1.5299728018550705E-9i 3.987869788151379E-10-1.960639656258842E-10i -5.977842891902581E-7+1.3639647058611232E-7i -2.6378989453010814E-4 -6.542752742154875E-5 0 1.244333476751513E-9-1.6548136203216639E-9i 5.971794296977788E-11-1.571061060122469E-10i -6.72093795794473E-7+1.4824540186856591E-7i -2.6695406991035964E-4 -8.260148716527267E-5 1.8585416910174043E-5 -9.569569933817123E-8+1.3714522993335787E-8i -1.8662824632123917E-8+3.1757586068141623E-9i...
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This document was uploaded on 01/24/2014.

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