H_75nm_L1_65um_D_1um

780023740828282e 521967639345625864e 5i

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Unformatted text preview: 871E-8i -2.311638579111747E-5+5.33658069551769E-6i 2.1600000000000005E-4 -1.4999159904950193E-4 0 1.2446798757042063E-6-5.662893823484533E-7i -9.929008902682891E-9+1.491275005345322E-8i -2.0286829278352993E-5+4.727382914414905E-6i 2.1689824355624167E-4 -1.4944299527593514E-4 1.4208718444694755E-7 7.063189712902243E-7-7.076032126361795E-8i -6.868136609042683E-9+1.8518236892330264E-8i -1.883815585983812E-5+4.6234525367384675E-6i 2.1599999999999996E-4 -1.4826158272720894E-4 0 1.6206620177200237E-6-5.980657666529191E-7i 4.690740251727584E-8+1.3034808539556363E-8i -2.2768981902089472E-5+5.260083924650327E-6i 2.179330462105457E-4 -1.4908347389883746E-4 0 -3.246369295051288E-7+8.674444420700818E-9i 1.5395853808100997E-8+1.3100727007188593E-8i -1.7253040191705926E-5+4.3928328973600965E-6i 2.1687493617890326E-4 -1.5097750695674273E-4 1.9485036149826458E-7 5.753963669102064E-7-3.5268375315438457E-8i -1.2217125092536412E-7+4.2955695936771776E-8i -1.7484600715467597E-5+4.346135828051498E-6i 2.16E-4 -1...
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