H_75nm_L1_65um_D_4um

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Unformatted text preview: 4718E-7i 2.18921677927651E-4 4.660660891329566E-5 -5.558337094722545E-6 2.113444604101156E-7+7.40604523367396E-8i -5.451123381327493E-9-3.120214158928054E-9i 1.0776741184331722E-6-1.519124371558488E-7i 2.1852356339897017E-4 5.113692975482367E-5 -7.557096961310664E-6 2.2952256173368562E-7+6.863571615892922E-8i -2.0626774168603022E-9-3.5502079140001618E-9i 1.0435680778560276E-6-1.6955185991407743E-7i 2.174369871255053E-4 5.1871277238444596E-5 -4.8534875454940305E-6 2.52786615049152E-7+9.756741358983455E-8i -4.327677664664948E-9-2.6696446476528156E-9i 1.0898163064656155E-6-1.5257909773724412E-7i 2.201845612390255E-4 7.559224991058592E-5 -8.419302966514163E-6 2.1556052496714693E-7+5.3841491092072554E-8i 1.5801587368116134E-8-1.0139465305374464E-9i 9.94253938116292E-7-1.6215892543029346E-7i 2.194218216967997E-4 7.924649455315919E-5 -1.0639356107493719E-5 2.3304333356820105E-7+4.9875015108669274E-8i 2.283970602164551E-8-9.020333429538895E-10i 9.62433672238466E-7-1.766097122576209E-7i 2.1709107566311356E-4 6.155565772594972E-5 -5.109767182436061E-6 2.711703754746904E-7+1.0135458680361948E-7i 1.6341838840731266E-9-1.728088482667063E-9i 1.0745049612085636E-6-1.5554645247034242E-7i 2.174675532089109E-4 6.179323420280013E-5 -8.144157335449303E-6 2.547279643649207E-7+7.43215842858415E-8i 5.73295370071828E-9-2.5658935068600313E-9i 1.0249855746770598E-6-1.7677903195701507E-7i 2.1736059435981648E-4 6.451021561279595E-5 -5.763599684623363E-6 2.6280022858366815E-7+9.232251274952242E-8i 4.383511445666493E-9-1.5993692673350686E-9i 1.0601721452357738E-6-1.5817461956574812E-7i 2.2015084242413106E-4 5.2186912536587294E-5 -5.337519667308829E-6 1.9082403744911645E-7+6.262319399734852E-8i -9.057296542962705E-10-2.3046188901949967E-9i 1.075456932937276E-6-1.42394940735216E-7i 2.1973323477906815E-4 5.873525657259565E-5 -6.7507044240264685E-6 2.1325508610090442E-7+6.37107937301234E-8i 3.115333422701129E-9-2.4126317655768134E-9i 1.046524741661686E-6-1.5522095610158089E-7i 2.208070339629387E-4 5.49200547501319E-5 -7.511075058218373E-6 1.97133386606897E-7+5.220932707021333E-8i 2.227612251640556E-9-2.823343206109966E-9i 1.0290333732177765E-6-1.6048892038341857E-7i 2.1872035780689755E-4 9.194934237663347E-6 -2.0086261527041357E-6 1.1984301803458444E-7+1.6319729829542503E-7i 8.487865243779534E-9+5.4951021418069625E-8i 1.123487819031846E-6-7.637854615853914E-8i 2.2167713441610112E-4 5.280721262753603E-6 -3.401012076253031E-6 9.093363512650241E-8+1.021391948337866E-7i 5.412215665929799E-9+2.5541117661642993E-8i 1.055316851055203E-6-1.2412707939648697E-7i 2.2070434599509052E-4 8.835782206814056E-6 -3.493326109854157E-6 9.489167485859079E-8+8.78869981293025E-8i 2.6723813091734494E-9+2.8863824701225728E-8i 1.0713900075569287E-6-1.2114633943441925E-7i 2.218812333903677E-4 7.0765003607679925E-6 -4.155515273194007E-6 9.234012377817466E-8+7.823383787096436E-8i 2.7209242113522526E-9+2.272758878541114E-8i 1.0457328367458846E-6-1.3926872878901635E-7i 2.1710998986635002E-4 3.346452181562738E-5 -4...
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This document was uploaded on 01/24/2014.

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