H_75nm_L1_65um_D_4um

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Unformatted text preview: 481297E-6i -1.4690873743499616E-4+1.6042637029131668E-5i -6.017821003644603E-4+1.1247245927095857E-4i -1.240647995301657E-4 5.0E-6 7.500000000000002E-8 -4.098551974519238E-7+5.7900792082710746E-8i -4.7236786234641316E-5+5.139508043845324E-7i -8.032437967999224E-4+1.321763841436906E-4i -1.2436088369972582E-4 3.2048441086714745E-6 9.912821679442528E-7 -4.503677262376089E-6+8.224093075278763E-7i -3.024861741132998E-5+3.65590015858381E-6i -5.735256199250591E-4+1.0786534671491932E-4i -1.229671387032617E-4 4.146877367718553E-6 1.7220393903085923E-7 3.727803323900452E-6-1.3071564180273348E-7i -4.355646455165919E-5+3.881549659150758E-6i -6.814023448522476E-4+1.1957702619561481E-4i -1.2633799010812886E-4 5.481176565518697E-6 8.569895670870433E-7 -4.9520632426852055E-6+9.789586755928582E-7i -2.0879759883666674E-4+2.0971148520867703E-5i -6.511699709490812E-4+1.1799141655630428E-4i -1.2579637939294825E-4 4.9999999999999996E-6 7.500000000000001E-8 -4.420140043317918E-6+2.547181294690495E-7i -9.270166301558539E-5+5.067456727296245E-6i -7.971985126518311E-4+1.3014760554322537E-4i -1.244047372208057E-4 4.0900739873038E-6 9.570166300998293E-8 -9.179330475358091E-6+7.446648075208154E-7i -2.9733745938527918E-5+3.1630477573217166E-6i -6.604182038084846E-4+1.1664033037398398E-4i -1.3305234163153232E-4 -7.589863174505058E-6 1.65777320969311E-6 -4.597910390375058E-6+1.2767492450100708E-6i 2.3685217495064375E-4-2.7321621145761272E-5i -4.7883543275714993E-4+9.970557039092286E-5i -1.3536049104973232E-4 -8.331432114519302E-6 1.4517831299543318E-6 -4.0669262032284594E-6+1.1066890231370072E-6i 2.5390192525293417E-4-2.9811985414298947E-5i -4.5254771557661985E-4+9.740030843582298E-5i -1.3689053837944988E-4 -8.346547795953446E-6 7.500000000000001E-8 -2.2877587134040313E-6+6.398931063023028E-7i 3.0016742151613986E-4-3.382998951266814E-5i -4.54122213906793E-4+1.0026167495645483E-4i -1.3352145373984116E-4 -6.62549743999257E-6 7.5E-8 -2.3356545800397774E-6+4.5361198469034355E-7i 3.21085954353157E-4-3.174602069469204E-5i -5.521274723294573E-4+1.0943442828378207E-4i -1.3523964341616274E-4 -7.153039719823382E-6 7.500000000000001E-8 -6.977126888093229E-7+3.8429033688558434E-7i 3.274683774594056E-4-3.350844855084153E-5i -5.162012418045948E-4+1.0630806781790346E-4i -1.3273853030162995E-4 -4.9999999999999996E-6 7.500000000000002E-8 3.578372802339521E-7-1.0491877129397385E-7i 8.732494496803219E-5-4.8092401287628425E-6i -7.671462877607118E-4+1.2345764024002858E-4i -1.3212678224630112E-4 -4.8794966666566166E-6 2.0220476186772E-6 -2.430899799061453E-6+8.32309448710315E-7i 1.2725012205415886E-4-1.3482819604087338E-5i -5.549961001072842E-4+1.0423765610978765E-4i -1.313404071977254E-4 -4.082524186498025E-6 9.495978514431541E-8 -1.1049739856128226E-5+7.893835137551264E-7i 3.0689574326814294E-5-3.4120400214554538E-6i -6.451750365178866E-4+1.1184956558504544E-4i -1.371027791849145E-4 -6.4885534592163736E-6 7.500000000000002E-8 -1.8431552814865725E-8+1.3947188800174834E-7i 2.999476409159082E-4-2.921424...
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This document was uploaded on 01/24/2014.

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