H_75nm_L1_65um_D_4um

0260895844801352e 4 7500000000000001e 8

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Unformatted text preview: 3302065E-6+1.1636092150414667E-7i -5.423162963425776E-4+1.0177119992893411E-4i -1.643037019488833E-4 5.581761082464042E-6 1.469198764159272E-6 5.72990972099305E-6-1.646360521871099E-6i -1.964530049321251E-4+2.1293974366726034E-5i -6.043345435058278E-4+1.140349362708221E-4i -1.595560418024002E-4 -3.6284733054891083E-6 0 -1.7810696985368143E-6+1.4860218398481495E-7i -8.099076899571354E-6+5.05144519612578E-7i -6.016442796753052E-4+1.0908751908069868E-4i -1.6127615238982707E-4 -3.1035317651484492E-6 0 6.774668708228737E-7-9.371735931323899E-8i -8.908006410257574E-6+7.220631471127614E-7i -5.761347447609963E-4+1.0724003118166989E-4i -1.595528718873879E-4 -1.3913364448717462E-6 0 6.5654098683008E-7-1.197293221864848E-7i -8.13807170792676E-7+2.1257848585124843E-8i -5.453874090671213E-4+1.0290356223614704E-4i -1.5861067770225803E-4 -1.912746209293108E-7 3.7281518219931476E-6 6.479449884293437E-6-1.8120089505468083E-6i 3.519798743556327E-6-4.4693750926561547E-7i -4.93882445655102E-4+9.647524376330072E-5i -1.620196776757446E-4 -1.096917790846595E-6 0 -9.534855909321127E-7+6.059970054650421E-8i -4.75895681135638E-6+4.88597710436578E-7i -5.497876044818211E-4+1.0423559010299512E-4i -1.6252083413413772E-4 -3.328229330066665E-6 2.4176311538681382E-6 6.332673427018223E-6-1.776502547616168E-6i 7.203569901922211E-5-8.253537441227691E-6i -5.459000351370521E-4+1.0435266343321722E-4i -1.6189363842251936E-4 3.52683469690488E-7 2.9093170334016216E-6 6.9139271961518586E-6-1.8529621981284532E-6i -4.724458075039175E-6+5.666061110326525E-7i -5.153477881961639E-4+1.0006194752470443E-4i -1.6042797664859938E-4 4.999999999999999E-6 7.500000000000002E-8 -2.0701985562595774E-6+8.251405377619164E-8i -7.720688997002665E-5+2.920624900604989E-6i -8.020689646288141E-4+1.3000084574732768E-4i -1.6945143886782128E-4 -3.5327026640693195E-6 1.1733945698907055E-6 5.435667264467949E-6-1.4430027087675157E-6i 5.017806335578731E-5-6.075301572406659E-6i -6.059171690005392E-4+1.146772202045129E-4i -1.6392102189894322E-4 -4.9999999999999996E-6 0 3.357226567724924E-7+2.1705609135145437E-8i 5.082271038810535E-5-1.0008569054141771E-5i -7.90113358882578E-4+1.2885911263361358E-4i -1.6305385976827619E-4 -3.1115848560892088E-6 0 8.364626927756524E-6-6.782421648962589E-7i -3.0141012201619077E-5+2.8769586931307045E-6i -5.894907827130771E-4+1.0932454125478219E-4i -1.6475399702621686E-4 -3.609353336277377E-6 0 -1.5829064948022947E-6+1.441913319661223E-7i -1.3657645688049031E-5+1.4231856558473014E-6i -6.370001650289105E-4+1.1489919433206209E-4i -2.4349066923064948E-4 -2.3326463711158095E-5 0 5.546025221105089E-7-1.62375609819021E-7i 3.42682260559557E-7-9.011358020477589E-8i 7.1844147737813E-5-1.7984459540906084E-5i -2.4277739782647303E-4 -2.8050926279500334E-5 5.948911264895592E-6 1.8488232915396666E-5-4.631665504088401E-6i 5.721397339172941E-6-1.3375297633899788E-6i 6.405799539363031E-5-1.614557032802175E-5i -2.4019281419133574E-4 -2.7704404495373724E-5 0 -2.2591024070129202E-7+3.02058803795306E-8i -7.777246966374416E-...
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This document was uploaded on 01/24/2014.

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