H_75nm_L1_65um_D_4um

03141428784673e 5 1422649291500236e 4

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Unformatted text preview: 62515E-4 4.2655702992293234E-5 -1.9999999999999998E-4 7.212610114771432E-7-1.821007323096756E-7i 8.713111848009714E-8-2.1032955051191527E-8i 1.3596170939182017E-7-4.227966730383994E-8i 2.253524672155359E-4 1.4215143631779171E-5 -1.9999999999999998E-4 7.35821076759911E-7-1.8565607335221597E-7i 2.986074001632636E-8-7.207470092892307E-9i 1.326056649781185E-7-4.162827827784165E-8i 2.4521357538524014E-4 2.321127337790547E-5 -2.187953534760885E-4 6.150224166531055E-7-1.5550291747125112E-7i 3.83319477636398E-8-9.318915478205612E-9i 9.523532977732611E-8-3.002902119781875E-8i 2.1051840564261757E-4 -1.0313614098665021E-4 -2.2778214486909748E-4 6.661532664090725E-7-1.7044576277177722E-7i -2.0193442222513973E-7+4.957436372488824E-8i 4.4356891806728294E-8-1.6865276989864124E-8i 1.990455700660063E-4 -7.812750948864347E-5 -1.9999999999999998E-4 8.204084117113864E-7-2.0888475324287416E-7i -1.967413488382584E-7+4.776291646374243E-8i 1.0933997766350404E-7-3.630445593015785E-8i 1.7871863098936923E-4 -9.430340942592148E-5 -1.9999999999999998E-4 9.05133498081645E-7-2.3182877123382548E-7i -2.789779693976371E-7+6.80675709224569E-8i 8.032767245340204E-8-2.932818599570183E-8i 1.6393319029531613E-4 -1.2257416385553504E-4 -1.9999999999999998E-4 9.113050554786022E-7-2.3481108186846852E-7i -3.811407115961767E-7+9.356399229749027E-8i 7.084305186139853E-8-2.603967246959422E-8i 1.7965357757662774E-4 -1.3094140456472504E-4 -2.240248867284703E-4 7.420724083201428E-7-1.9124069315195491E-7i -3.1329248795347343E-7+7.738323324036121E-8i 1.9233112336606807E-8-1.0583494934292306E-8i 2.159465627401189E-4 5.308924898604527E-6 -2.1951682108194492E-4 7.637862422140813E-7-1.9419372830641225E-7i 1.1810297823236956E-8-2.892949722448054E-9i 5.166278367275999E-8-2.0478694282999868E-8i 1.9929231739564888E-4 -3.7620808077975013E-7 -1.9999999999999998E-4 9.058374537020894E-7-2.300358102841528E-7i -5.01346705993668E-10+1.0823777225587032E-10i 9.188850523084409E-8-3.311415240335627E-8i 1.9995576616863215E-4 -2.8287967679122022E-5 -1.9999999999999998E-4 8.863972992608031E-7-2.2511796507563067E-7i -7.577504978129061E-8+1.839419677396524E-8i 9.503060162616047E-8-3.366545545756956E-8i 1.9853592864575557E-4 2.8280412743076364E-5 -1.9999999999999998E-4 8.995079767142145E-7-2.2854337127177542E-7i 7.756600196469874E-8-1.8860403939858333E-8i 9.374347332522283E-8-3.347037179138056E-8i 2.242572741737422E-4 -2.869373181226664E-5 -2.2966548341572907E-4 6.930081050905499E-7-1.763932574882317E-7i -5.611346528278726E-8+1.3724621506508569E-8i 3.6877446016074266E-8-1.561639182818064E-8i 2.010487974417173E-4 -5.6089597348303916E-5 -1.9999999999999998E-4 8.47759030196043E-7-2.1549235398771121E-7i -1.4393186316885597E-7+3.4927432064828875E-8i 1.0405597761012612E-7-3.5435375261099147E-8i 4.5005498318136474E-4 -3.114757473321794E-4 -5.098405348120936E-4 8.62274248621976E-8-2.2410003412265435E-8i -4.5784615372113124E-8+1.1715614553433178E-8i -8.147565393425737E-9+1.7979220607495648E-9i 4.0766906454142634E-4 -2.733429862813594E-4 -...
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This document was uploaded on 01/24/2014.

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