H_75nm_L1_65um_D_4um

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Unformatted text preview: 4776704138079E-10i 1.269428846138428E-9+1.7360103250530764E-9i 2.235426876725527E-6-2.8705520107788615E-7i 1.5584101142558578E-4 1.66268898616179E-6 -2.062993172661549E-6 5.371206420866956E-8-6.822621482498703E-9i -4.265062404006533E-8-1.8708071655596626E-8i 2.2504705937830555E-6-3.036608187757094E-7i 1.5450551799098773E-4 3.6030088874594796E-6 0 1.4617784546090806E-9-1.5064697846777762E-9i -6.323735161353646E-9-1.125307732980336E-9i 2.419218847506687E-6-2.43786485020873E-7i 1.5457540810424504E-4 1.4451421879934864E-6 0 3.3298647299866862E-9-4.111561706438299E-10i -1.934033426272832E-9+1.6143969628857428E-10i 2.3118851126820687E-6-2.9405462646758634E-7i 1.5334444641988196E-4 2.68487675945861E-6 -1.8374578457484922E-6 5.0427174581792416E-8-6.140361182839503E-9i -7.57937537115424E-8-3.4653485726316517E-8i 2.3415114830886752E-6-2.9877137247842223E-7i 2.3516976408750586E-4 -4.4060355632811186E-6 0 2.0666832318272617E-9-2.7260187028736313E-9i -1.1187427023332036E-10+1.0289964443284873E-10i 8.968082859595904E-7-1.6194534902416014E-7i 2.3670741426017327E-4 -6.39130563595242E-6 -3.4418506427887536E-6 3.4454096217157836E-8-6.809451177792952E-10i -1.0561733638150754E-10-1.2411565193866503E-10i 8.804768749110043E-7-1.642685863187237E-7i 2.3377126913884933E-4 -1.6201696683720726E-6 0 2.3465090833504202E-9-2.5332836205496646E-9i -1.702809544193093E-10+5.5171696031197645E-11i 9.104906732770044E-7-1.6036998484830712E-7i 2.385446724009449E-4 -9.600099316105378E-7 0 2.2374732975311537E-9-2.4023480917867354E-9i -1.4121836263264156E-10+6.464245555419674E-11i 8.650068021803461E-7-1.6402181865993776E-7i 2.3912284204789097E-4 -7.54986911552955E-6 0 2.1453043029061433E-9-2.39177588309053E-9i -2.1278014212965739E-10-8.26752373701313E-12i 8.596226185694678E-7-1.6439418099723206E-7i 2.425988934349734E-4 -7.333966007740803E-6 -3.1777861666822354E-6 2.8186646841035252E-8-3.0115931065705894E-9i -1.9309553744223028E-10+7.895843097549769E-11i 8.293076446988434E-7-1.6440184464230366E-7i 2.227622815565514E-4 -4.340709996331204E-5 0 2.3882501950287727E-9-5.911731645352075E-9i 2.7911486581857728E-11+1.0243037446211788E-10i 1.1105952109338888E-6-1.1171357003848215E-7i 2.2320577935948217E-4 -4.422554986978843E-5 -3.074154094454952E-6 8.93934850821598E-8+2.484136002735441E-8i 1.1666591431674806E-9+1.2522553129983454E-9i 1.0725295164475096E-6-1.290020184954313E-7i 2.254267048820744E-4 -4.209124156062671E-5 0 2.7430279200112997E-9-4.171629763623016E-9i -2.8596753973303966E-10-6.188551289954323E-11i 1.039801191594487E-6-1.3533870766715784E-7i 2.228028131982452E-4 -4.0861195674004236E-5 0 2.929459349286566E-9-5.5177474173693005E-9i -1.8750198147954889E-10-1.7648986475107358E-11i 1.1071753012667616E-6-1.1335467472738633E-7i 2.2457657285085831E-4 -4.034357076102242E-5 -2.5559532276287335E-6 6.082963268715812E-8+1.3115584122358414E-8i 1.0815017706304333E-9+9.815863344897638E-10i 1.0463836587950781E-6-1.3623496114419608E-7i 2.246571911124343E-4 -4.452201117388177E-5 0 2.904419905953636E-9-4.4...
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This document was uploaded on 01/24/2014.

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