H_75nm_L1_65um_D_4um

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Unformatted text preview: E-4i -1.5569863290174725E-5 -1.9999795638207156E-6 0 7.613936608351952E-6-1.7645620262740636E-6i 3.3623228917280457E-6-7.732426829308383E-7i -0.00267859702449794+6.186413714447392E-4i -1.5319188384462252E-5 2.4398406171174134E-6 0 7.85963219677108E-6-1.879822373380043E-6i -5.728105821741399E-7+2.0131845270832117E-7i -0.002868163227474589+6.622277664570169E-4i -1.5307520774732997E-5 3.258653417443368E-6 -9.235022686433285E-7 3.5244211664308106E-4-8.100443231364857E-5i 3.417694725969197E-4-7.85835641240934E-5i -0.0028469438974434206+6.577971632846595E-4i -1.5887416203277306E-5 9.955693315864594E-7 0 -8.777735101493061E-6+1.9438125150386676E-6i 5.650387392163883E-6-1.2566980136380357E-6i -0.002500146003113667+5.77515850789384E-4i -1.6290969852962024E-5 6.473908432699629E-7 -1.5433861177859117E-6 3.4565504720572245E-4-7.955418789791308E-5i 5.2663710493474486E-5-1.213715192486455E-5i -0.0021205628239853113+4.904069747362145E-4i -1.6647472922170438E-5 1.7074456536576045E-6 -1.135650365380309E-6 2.1152280962236707E-4-4.8738515739386995E-5i 1.3384075351896752E-4-3.082461894260992E-5i -0.002214397112583163+5.119855401880025E-4i -1.695025834889652E-5 2.009468623431944E-6 0 2.3458746302204568E-6-5.826080489532148E-7i -1.4077143599600106E-5+3.2872062319583283E-6i -0.0023234510469135397+5.370288891187497E-4i -1.6540551551207803E-5 2.975103265839696E-6 -9.056202660749195E-7 1.766142053807613E-4-4.0715532343606316E-5i 2.8941199261895003E-4-6.654082995470514E-5i -0.002505686154260924+5.791493957452518E-4i -9.633834450388335E-6 9.999999999999999E-6 0 5.6083728439267413E-5-1.3113939968127008E-5i 7.021750778096527E-4-1.6169090701029703E-4i 0.0014750814649275104-3.4337764606531617E-4i -9.379900677578155E-6 1.0722048816394825E-5 -9.645892410420635E-7 1.4122653015532252E-4-3.3027723168833506E-5i 3.1382076770947165E-4-7.302967685898757E-5i 6.34937476160559E-4-1.481271247742704E-4i -1.119635393027599E-5 9.999999999999999E-6 0 1.1718872381456703E-4-2.7350022212526852E-5i 0.0011671293952090686-2.7067816801886114E-4i 0.00184591888045323-4.310831077270107E-4i -1.0567561034754328E-5 1.0123336375266396E-5 -7.945469266248455E-7 1.934119071559471E-4-4.520406792295484E-5i 7.052178600645706E-4-1.6403401080777245E-4i 9.578716708115558E-4-2.2352647694813058E-4i -8.8172820197037E-6 1.169927653334494E-5 0 -2.5541646997346033E-6+5.550771848410334E-7i -2.401188610972168E-5+5.365181225573593E-6i 4.921346965337944E-4-1.1489731856260928E-4i -1.4541340298914582E-5 9.999999999999999E-6 0 2.8090218454603078E-5-6.368731398092205E-6i 0.0018422097287367368-4.2787316619040855E-4i 0.0027044837536362534-6.315268469570688E-4i -1.5593400646425864E-5 9.584420402418078E-6 -8.569338433780053E-7 1.5005441262690698E-4-3.4746623218524526E-5i 0.002040905646681238-4.7571183145648545E-4i 0.0012793964118549507-2.9916115289492853E-4i -1.3340642589666539E-5 9.641864374829895E-6 -1.3503483995680638E-6 2.8409149971258835E-4-6.611129839963138E-5i 0.0013959972972648893-3.2578172091874726E-4i 6.612970230485164E-4-1.54331...
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This document was uploaded on 01/24/2014.

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