H_75nm_L1_65um_D_4um

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Unformatted text preview: 16935979098E-8i 5.386937444240211E-7+2.1400831736023867E-7i 2.4915960279582387E-6-7.944158321392784E-7i 1.250992753415129E-4 -1.5843458611894866E-5 -2.3646001857225885E-6 1.0264055285797238E-7-8.33721604351528E-9i 4.926857138607533E-7+2.045836285437502E-7i 2.567063232430219E-6-7.33779745127571E-7i 1.0906705817284427E-4 -1.151239492036088E-5 0 -7.033150524395504E-9-1.5290711416330629E-9i 6.55021565374971E-7+2.872171619565221E-7i 3.3396367518420513E-6-8.726618820229128E-7i 1.0775435105784764E-4 -8.57507514368914E-6 0 -3.6730503586592405E-9-1.769939150298874E-9i 7.248931272211161E-7+3.301585757300153E-7i 3.618998570007842E-6-8.004536019444458E-7i 1.0782255872010311E-4 -9.36501134937046E-6 -2.5319219721518026E-6 1.1181365631631336E-7-3.8250955480263795E-8i 5.008480428508737E-7+2.3111059135785105E-7i 3.5605313029601625E-6-8.105692105727174E-7i 1.0644624404727588E-4 -1.0670411214321767E-5 0 -1.0594754631730029E-8-4.220985995535941E-9i 6.681779915181675E-7+2.9725539880763E-7i 3.515459979541224E-6-8.885165171289296E-7i 1.0795976337718579E-4 -6.99042257564957E-6 -1.4670479784548614E-6 6.582917558044901E-8-2.2511648757022677E-8i 5.360708123307178E-7+2.565960131795206E-7i 3.792623748267145E-6-7.087425246940676E-7i 1.0335223720197599E-4 -1.1551796448231502E-5 0 -2.02967330517654E-8-8.535370251061299E-9i 6.404957060101628E-7+2.8307320094263747E-7i 3.601006818317561E-6-9.62434092125101E-7i 9.970291117193139E-5 -1.2060076252664044E-5 0 -3.8375629958913046E-8-1.737603526454426E-8i 6.021068600583752E-7+2.656993513339411E-7i 3.764922809573992E-6-1.0336647333771383E-6i 1.0097145011471483E-4 -9.508781445624902E-6 0 -1.804286835122553E-8-8.686144893203721E-9i 6.735493645381733E-7+3.0653998413306394E-7i 3.874941388679603E-6-9.405993532039948E-7i 1.0179381834358038E-4 -1.262826799300336E-5 -2.1045241687308322E-6 7.703815388255656E-8-4.867481689443479E-8i 4.980341231893298E-7+2.2383893777241944E-7i 3.662669210341882E-6-9.845460877022537E-7i 1.0509720349873932E-4 -8.84963188378901E-6 0 -7.440208538459989E-9-3.622881904208081E-9i 7.072646084066349E-7+3.225934311676783E-7i 3.7190309694011513E-6-8.510801525416498E-7i 1.0322493074364601E-4 -8.217326691291716E-6 -2.0313809826215176E-6 9.349333667393384E-8-3.7828100445172246E-8i 5.126477756504732E-7+2.4212741360725343E-7i 3.874917045220613E-6-8.425533699179002E-7i 1.0288461328671198E-4 -8.392728867256477E-6 0 -1.0049106433904264E-8-4.860450927173833E-9i 7.167217368465249E-7+3.298464843027129E-7i 3.873094227827343E-6-8.681529759709556E-7i 1.0568177378015489E-4 -7.716476494401375E-6 -2.0828922651455704E-6 9.499719236905944E-8-3.4636203521785506E-8i 4.980392033289529E-7+2.3657312347813091E-7i 3.797281985352447E-6-7.844191294141721E-7i 1.0450776522270202E-4 -1.0340521592148558E-5 -2.7507252819458494E-6 1.207211726632669E-7-4.8886947354760645E-8i 4.864014625377444E-7+2.2423066704577014E-7i 3.6540636330456335E-6-8.861907572890052E-7i 1.0112089102192361E-4 -7.513506776270246E-6 -2.418696406894473E-6 1.1567936860890455E-7-4.80598805219...
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This document was uploaded on 01/24/2014.

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