H_75nm_L1_65um_D_4um

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Unformatted text preview: 91712489E-7i 6.704000176163901E-5 1.0644431908290086E-4 -1.1575533635605101E-6 -3.271460560132569E-8-7.553390437129517E-8i 4.604248572309359E-8-9.838733296498904E-9i 4.328917017408843E-6-8.028472776879118E-7i 6.715939306586437E-5 1.0859450288116585E-4 -1.5523563286981575E-6 -5.881743827764412E-8-1.0697823485820737E-7i 5.7527373586207825E-8-1.2265360601855135E-8i 4.249709278469021E-6-7.901792337915159E-7i 6.604919081355558E-5 1.0867617648847348E-4 0 1.0840485170767952E-8-9.865997512232064E-9i 5.659908418204356E-9-5.1594303714357775E-9i 4.2663718788487086E-6-8.148258232066835E-7i 6.651608311686583E-5 1.1048572429895936E-4 -2.392407495830047E-6 -2.0926773272389133E-8-1.1193524605736943E-7i 8.577869950776544E-8-1.652156690997207E-8i 4.14523958406086E-6-8.235735566471114E-7i 6.481855235754068E-5 1.1262208764763975E-4 -2.1352417754997367E-6 3.0296516365846005E-8-7.35485303468762E-8i 7.62138566052646E-8-1.7240044215009346E-8i 4.101331785462415E-6-8.55469953322586E-7i 6.725625377532967E-5 9.366744515090382E-5 0 3.5551632193708826E-8+5.06413211365242E-9i 3.7144358942808875E-9-6.560866299028245E-9i 4.810030433636752E-6-8.435533779224542E-7i 6.785302530172393E-5 9.539244619825938E-5 0 2.9804188262671207E-9-3.071964441586212E-8i 4.1230841735774875E-9-5.419883669197357E-9i 4.833209755740382E-6-7.514781959138464E-7i 6.733041256893363E-5 9.709467153183321E-5 0 2.153957645023574E-8-6.727546691953634E-9i 4.017740605488651E-9-5.6225623115691015E-9i 4.7012301387733265E-6-8.128562389516508E-7i 6.651816167900198E-5 9.626835760401942E-5 -1.5468544742475617E-6 -2.4557098679969186E-8-9.920252326024726E-8i 5.7604958471741856E-8-1.4872770498863664E-8i 4.66889775256236E-6-8.872845258926748E-7i 6.683243760880984E-5 9.88772658870882E-5 -1.4670454758431768E-6 -3.8751575683922673E-8-1.0167913179811278E-7i 5.5968903225586727E-8-1.3042536934274254E-8i 4.582429927326549E-6-8.557596057867176E-7i 6.723592816895314E-5 7.290221543956887E-5 0 5.040867749060905E-8+5.870617193759475E-9i 4.563559837562308E-9-5.567539261712638E-9i 5.569787328053957E-6-9.71594645653716E-7i 6.817530337725653E-5 7.391137858171932E-5 -1.973033181323059E-6 -1.4492607118980508E-7-2.169569146518522E-7i 7.273363126048991E-8-1.7834785263525322E-8i 5.4176968594525845E-6-9.957535003694666E-7i 6.629967232619924E-5 7.340873562475643E-5 -1.391081088736746E-6 3.851379853806975E-9-1.0384956403807753E-7i 5.664684654513087E-8-1.4728877957007436E-8i 5.495830503460836E-6-1.059537224090327E-6i 6.523756543245795E-5 7.452670098957541E-5 0 1.2263538960775119E-8-1.414219112970085E-8i 5.0503186791649545E-9-5.089894130170867E-9i 5.48466978144508E-6-1.0939445686423848E-6i 6.706938458307096E-5 6.768969882170013E-5 0 3.816917995153509E-8+1.2393982032806357E-9i 5.311687858074639E-9-4.473073548135383E-9i 5.74630142997099E-6-1.0296690307190407E-6i 6.723229232319947E-5 6.592572427603535E-5 0 2.7953767144789365E-8-1.0132377090132927E-8i 5.56354553728905E-9-3.735734926263445E-9i 5.809194238081277E-6-1.0356455341781294E-6i 6.701317023898986E-5 7...
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This document was uploaded on 01/24/2014.

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