H_75nm_L1_65um_D_4um

0906588233999554e 6 7112197163573122e 7

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Unformatted text preview: 181276823557E-8+1.642876162112578E-8i 6.90465999879374E-6-1.8327341285171324E-6i -2.3372038707150807E-4 1.6546903868579958E-4 -8.161352910709967E-6 -9.604178096847205E-7+2.5405872318567885E-7i 1.2675092453023051E-6-3.2526765977806327E-7i 8.308365025381836E-6-2.2102011418568736E-6i -2.4188508848215265E-4 1.7052511387923648E-4 -1.0261448774599695E-5 -8.556194874317775E-7+2.2905028558035582E-7i 1.132519325320512E-6-2.930470064941545E-7i 6.7991969365684726E-6-1.8066883153991159E-6i -3.0000000000000003E-4 2.0E-4 -1.71374084072438E-4 -1.210390651899178E-6+3.183418797101755E-7i 1.4504058617216406E-6-3.7822636601244494E-7i -2.540596698318888E-8+9.473008921127152E-9i -2.2224054256775633E-4 1.206344745398479E-4 -1.996801282505651E-6 -5.835153193642832E-6+1.3952684399393172E-6i 1.7089637692482542E-6-4.513334435081946E-7i 3.395132025413244E-5-8.898327471462389E-6i -2.2103505214412017E-4 1.224441624506711E-4 -2.9924371689421315E-6 -9.63946813072791E-6+2.295477511534654E-6i 2.691679399624211E-6-7.228657463020283E-7i 3.282717891894411E-5-8.638507267678184E-6i -2.2261068757783742E-4 1.109293103201786E-4 0 3.7315765352707864E-7-1.1101803893611505E-7i 2.2559394408094846E-8+1.245649184337066E-8i 4.321772822473582E-5-1.1369371416975264E-5i -2.2330029249498183E-4 1.0964676033839224E-4 -1.954915952521092E-6 -5.9046622991261504E-6+1.4823411176803423E-6i 1.7248927981414625E-6-4.5788321509992907E-7i 4.050484091743743E-5-1.072984878375941E-5i -2.247379461512847E-4 1.227199832246258E-4 0 -6.121234994808471E-8-2.6267704178462027E-9i 7.749962008252177E-9+1.3263749308138155E-8i 2.86442844925546E-5-7.521198345947788E-6i -2.2420425116105228E-4 1.2288367221538373E-4 -2.4664660731603184E-6 -4.1817033482483695E-6+1.0198941830289824E-6i 1.6592558378832056E-6-4.371880492586842E-7i 2.8355058937542457E-5-7.466105464164555E-6i -2.2494762771798187E-4 1.1921417409052506E-4 -2.2007470960608577E-6 -3.7647754880514797E-6+9.317248922849586E-7i 1.4497767495394763E-6-3.819655567302758E-7i 2.9813012143759418E-5-7.8761231039656E-6i -2.25803724613901E-4 1.2013721686233791E-4 0 -3.7804291207893526E-8-7.505192869960986E-9i -3.4590448907967364E-9+1.561683549838877E-8i 2.8498599045782662E-5-7.520832569743625E-6i -2.2362364943600974E-4 1.1566079282215446E-4 -2.0292160349715658E-6 -4.956540963116432E-6+1.2253052336941757E-6i 1.613822176229586E-6-4.2674309828271724E-7i 3.4905289647549874E-5-9.214196222689873E-6i -2.255939509388711E-4 1.1487412431523727E-4 0 2.6295285052389352E-9-1.988440454537647E-8i -3.069262426389866E-8+2.323882136492002E-8i 3.2437196010697576E-5-8.580939499805244E-6i -2.2473734852539477E-4 1.1222033668696965E-4 0 7.15866737624471E-8-3.783022796225814E-8i 1.2558458514314956E-8+1.30797458021877E-8i 3.629377493292185E-5-9.59443970814008E-6i -2.2485613684640132E-4 1.1748184583727275E-4 0 -6.381861233160292E-8-3.1078482858553687E-9i 7.294332251853416E-9+1.3675712829851572E-8i 3.190500634400035E-5-8.413210898186236E-6i -2.2696520829828198E-4 1.2467726169360807E-4 -2.896278002452064E-6 -3.060...
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This document was uploaded on 01/24/2014.

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