H_75nm_L1_65um_D_4um

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Unformatted text preview: 2.078353281202439E-4 -7.456497080059108E-6 3.9585933562899476E-6 -1.0245763491575857E-7-5.427438448464578E-8i -5.755036245177622E-8+2.2548995156129564E-8i 1.1466613639004253E-6-3.129952390327983E-7i 2.06507607078898E-4 -3.678191699108001E-6 1.8003896823759143E-6 -3.854774465588782E-8-1.7917417622155634E-8i -2.71264533350725E-8+5.2188987281237E-9i 1.2118249243708626E-6-3.292946969295562E-7i 2.0354949834154118E-4 -5.199527831442394E-6 2.401156780276361E-6 -5.533531176668192E-8-2.201088639804216E-8i -7.832943128235867E-8-4.310853673442003E-9i 1.2617722049759699E-6-3.1273876763796463E-7i 2.088386688450151E-4 -4.608056814638006E-6 2.069168855903352E-6 -5.179498561479252E-8-3.240687533243747E-8i -3.303389896459849E-8+2.4730301585927064E-8i 1.1669850400712653E-6-3.48411189208305E-7i 2.3391047940118378E-4 2.9376122960021516E-6 0 2.5048873006818623E-9-2.321286644787524E-9i -1.4380853700835387E-10+2.2253075934228513E-10i 9.09122031576665E-7-1.6062857557673284E-7i 2.306972435461082E-4 6.118556111588933E-6 0 2.393390834237722E-9-3.0168656058509446E-9i -1.4169530393012215E-10+2.2835701806507016E-10i 9.443148200943546E-7-1.5408282441596278E-7i 2.296558102712495E-4 3.2464661594665126E-6 0 2.4659099661396278E-9-3.0171987783509996E-9i -3.2357588432811593E-10+4.7904965120481235E-11i 9.562144603003987E-7-1.4992952303575835E-7i 2.2899830367873863E-4 4.349591267970988E-6 1.8820461909528134E-6 -2.0803914615939716E-8-1.1295405184590882E-8i -2.5408786702650746E-10-6.276155177285495E-10i 9.632734955841233E-7-1.4950376347600269E-7i 2.277438909459621E-4 1.4802478726882696E-6 0 2.2700576563362655E-9-3.5599590870789573E-9i -2.5543067856763394E-10+2.416927605198355E-10i 9.813885633466132E-7-1.3816364544692164E-7i 2.2494513161415197E-4 1.9727532781359974E-5 0 4.07512087369017E-9-3.8402715120230144E-9i -1.0596774015411463E-10+8.701468711479724E-11i 1.0317429787749283E-6-1.3536796019026172E-7i 2.2900436131759145E-4 1.0564043847260149E-5 0 2.745022540955093E-9-3.180638629213863E-9i -2.077616629061646E-10+3.1031356217264827E-10i 9.646587305184969E-7-1.5131784510117893E-7i 2.2933097237152109E-4 7.863063459401675E-6 2.7385949718531002E-6 -3.0776740543651615E-8-1.2562396922706544E-8i 2.8943837933238913E-11-1.1034396127168941E-9i 9.58245646711597E-7-1.5378907234754606E-7i 2.3376854274718305E-4 8.163902281185039E-6 0 2.842795745847278E-9-2.3684980530862357E-9i -3.6647752833031703E-10+2.2016654032835677E-11i 9.109527326986531E-7-1.6077662651874103E-7i 2.252288292800549E-4 8.427498928658403E-6 0 2.998059314267501E-9-4.4651103855319694E-9i -3.377649489784483E-10+3.1438716401622585E-10i 1.0184414005506018E-6-1.252990695189172E-7i 2.3415384988948E-4 1.2547415979579301E-5 0 3.294887820623988E-9-1.9851304026089155E-9i -2.0740267431544787E-10+1.5531574046627125E-10i 9.072325082318162E-7-1.618598588977144E-7i 2.3054100150502203E-4 -4.322116141868926E-7 0 2.7535120826563823E-9-2.2272466686674377E-9i -2.1270764950337607E-10+1.031290656811967E-10i 9.459419744225725E-7-1.5239223752094603E-7i 2.310628420955337...
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This document was uploaded on 01/24/2014.

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