H_75nm_L1_65um_D_4um

104037447633265e 712105325286781133e 7i

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Unformatted text preview: 79537922E-6 -1.386600244223813E-6 1.9533592674294974E-7-8.591655658613717E-8i 2.1811885979949242E-7+2.015517536596778E-7i 7.517209486732202E-6-1.7039897069688029E-6i 6.474804330130565E-5 8.386021127165946E-6 0 4.189217296442785E-9-2.0624164901107814E-8i 4.607029903300083E-7+3.5072716720598694E-7i 7.434941502706827E-6-1.730480671793218E-6i 6.34491587696936E-5 6.993585137691812E-6 0 4.0680034591876645E-9-1.4758333428817385E-8i 2.95564205453477E-7+2.92834218630373E-7i 7.5046291492536185E-6-1.907523959211648E-6i 6.337868029564816E-5 8.764690213959493E-6 0 7.263743801559578E-9-1.5071386099845263E-8i 4.4891977927306237E-7+3.6008278028892776E-7i 7.750195724716884E-6-1.7381660460591104E-6i 5.81997161600002E-5 8.862351364865718E-6 0 7.192908907847658E-9-1.1999675673035268E-8i 4.3578145233106264E-7+3.510640518199277E-7i 8.596478655389967E-6-1.9966290776008835E-6i 5.9877346642885596E-5 8.320502356901996E-6 0 1.5200041641858456E-8-1.0405740401444647E-8i 4.0848767918656745E-7+3.3532054057622906E-7i 8.179559478477845E-6-1.9762109261620127E-6i 5.8518100632387295E-5 7.50875150809208E-6 0 1.2627065048543859E-8-1.0145973426243476E-8i 3.351730348660665E-7+3.0032457167826686E-7i 8.359677086615318E-6-2.1128643011259747E-6i 5.901934151778564E-5 8.383302998404118E-6 -8.901665450579137E-7 1.7282558768335233E-7-5.573321347978428E-8i 2.8406439086490466E-7+2.4770613417203217E-7i 8.368509197338915E-6-1.992534120252344E-6i 7.082311401413171E-5 1.5729646414892775E-5 0 -7.234007424377225E-7-3.9922819601532677E-7i -2.575856301850354E-8-1.1096239974318496E-8i 6.595165637684308E-6-1.463278947200779E-6i 6.899999999999997E-5 1.6589907882368933E-5 0 -6.413973421826036E-8-3.282686605506531E-7i 1.0135636311729238E-8-2.0716007381738066E-9i 7.435813842835828E-6-1.137429649374084E-6i 7.034943468689888E-5 1.743098415813742E-5 0 -7.931576482450773E-7-4.2293379826383435E-7i -3.7579385405082736E-8-1.3531208056805077E-8i 6.741737821387601E-6-1.429381367119129E-6i 6.885938572776523E-5 1.6840009515375577E-5 -1.211067506440478E-6 -4.940105792927556E-8-2.4712781083359235E-7i 8.371023772528356E-9-9.10168884791368E-9i 7.008973753434777E-6-1.3681797901797949E-6i 6.899999999999997E-5 1.832376231276453E-5 0 -1.8713191654158175E-7-3.20207722398867E-7i -3.9586209213874545E-9-4.71112032814095E-9i 7.353712067346936E-6-1.1752267796461983E-6i 1.1367547919101698E-4 -4.9999999999999996E-6 0 1.1009453782222928E-8+1.7728347741449734E-9i 3.23024471860202E-7+2.3092940310203755E-7i 4.196196559360242E-6-3.265669749668998E-7i 1.1482207539623855E-4 -5.228939263728416E-6 -7.990126566030878E-7 3.5686556637181485E-8-9.367108652847514E-9i 3.898891877358899E-7+2.1800752078312382E-7i 3.850173826393934E-6-4.5429990001716834E-7i 1.171386107772567E-4 -4.9999999999999996E-6 0 -4.374326791993048E-10-3.2636776200867276E-9i 3.1725389920352743E-7+2.30237717721726E-7i 4.048486676893495E-6-2.8439458089421836E-7i 1.1819892447716874E-4 -4.2527863975426236E-6 -1.0634750136533982E-6 4.483405126707046E-8-1.1178777084812026E-8i 1.6759628520516...
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