H_75nm_L1_65um_D_4um

1066931390040472e 4 6261724328225599e 6

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Unformatted text preview: 6523E-4 0 4.307945083775397E-9-1.4456519428817163E-9i 4.765582413933378E-9+1.923904501899623E-8i 1.832735846309147E-6-1.644610826545747E-7i 1.3486818510168995E-4 -1.556134214204837E-4 -1.6158449942256299E-6 2.6108834479728755E-8-4.715196302851332E-9i -2.1030146992355793E-7-8.621848305748019E-8i 1.7961610065518433E-6-1.7648661042803277E-7i 1.355304833380007E-4 -1.5713639289083382E-4 0 2.5534709028501978E-9-2.1872714080929697E-9i 1.6050627983213845E-8+2.3555801381229074E-8i 1.740558848435972E-6-1.9412841716547123E-7i 1.3499320090303718E-4 -1.5694521944487486E-4 -2.318973432635547E-6 3.1855142415852455E-8-8.412570381109707E-9i -1.5639421399459183E-7-5.4945954355931774E-8i 1.696658201813658E-6-2.1751203120800535E-7i 1.376372805347806E-4 -1.5907288831713267E-4 0 2.4591902568802904E-9-2.2806488057589216E-9i -2.529561534145217E-9+7.87752021413047E-9i 1.6113096321592618E-6-2.268735650194666E-7i 1.3969975495024307E-4 -1.6006702473604005E-4 -2.1561068850254172E-6 2.8011993305336082E-8-7.505335368517343E-9i -7.088339425775177E-8-1.5482956005892328E-8i 1.5388538267631932E-6-2.379168586314883E-7i 1.34676747961501E-4 -1.5893452215234364E-4 0 1.8023884374922799E-9-2.7131464990794683E-9i 1.7481347693561766E-10+9.651457824657947E-9i 1.6582598284376893E-6-2.3057054643905228E-7i 1.3579363353620437E-4 -1.5987236840944241E-4 -2.7137955311554396E-6 3.5585262078768805E-8-9.41019400380804E-9i -9.10856751717195E-8-2.164738507572832E-8i 1.5830062070270476E-6-2.505380529105409E-7i 1.3284223683026144E-4 -1.5773401399644284E-4 -2.634696493953416E-6 3.61032856859532E-8-9.557098934241035E-9i -1.3659919228432588E-7-4.303381867902523E-8i 1.689180036105376E-6-2.3644780542055218E-7i 1.309533829464714E-4 -1.5917608984035257E-4 0 3.2755902288115713E-9-1.9792612519562094E-9i -1.4968440245968773E-9+8.681917493885587E-9i 1.694102260076848E-6-2.456208975172683E-7i 1.325102997194194E-4 -1.5816863974301213E-4 0 2.807472803892922E-9-2.204162097944342E-9i -3.226947346921666E-9+8.852933412128409E-9i 1.717131377551237E-6-2.258316592791687E-7i 1.287373367491556E-4 -1.5858314112868264E-4 0 1.5924744896020359E-9-2.923855246372148E-9i -2.0287754762607357E-9+9.153145693122089E-9i 1.7472857190768925E-6-2.438267226368927E-7i 1.2849316242435414E-4 -1.5982452649332824E-4 -2.2936597939363546E-6 3.18179925806894E-8-9.283576634303506E-9i -8.257725977668113E-8-1.821410184529657E-8i 1.682752307789191E-6-2.6878625375379085E-7i 1.2749779485949272E-4 -1.570321102131913E-4 -2.67690446386873E-6 3.7166860078095484E-8-1.0936190204540691E-8i -1.6423644107205074E-7-5.523479260775682E-8i 1.7774440016771973E-6-2.478886095298575E-7i 2.2069621295749193E-4 -7.808837914600843E-5 0 -1.1002372067757667E-9-1.2604241392239066E-8i -3.7591119894248476E-10-6.922754539033747E-11i 1.2004296580126708E-6-5.742741227175457E-8i 2.1951127094014646E-4 -7.896899441736333E-5 -2.0018509901475368E-6 1.909320154870622E-7+7.787232553432592E-8i -4.871074953412742E-9-2.684450204798681E-10i 1.17489934424387E-6-7.395537338275888E-8i 2.200895688060781...
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This document was uploaded on 01/24/2014.

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