H_75nm_L1_65um_D_4um

109846873249231e 4 15434195570964157e 6

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Unformatted text preview: 86952083012613E-5-4.312206497550325E-6i -7.522455147645755E-5 1.5541959969194203E-4 -1.090571121776585E-6 8.887467665037729E-7-1.8593254681384397E-7i 2.5810805988103758E-6-4.378104740479505E-7i 1.8815084131005265E-5-4.672052987073766E-6i -7.57323209479747E-5 1.5499999999999995E-4 0 2.0101207272767615E-7-2.5563020644714385E-8i 3.194013191920669E-6-3.602104327186957E-7i 2.279884777359706E-5-5.307420756918286E-6i -7.315963131036403E-5 1.5630546715985483E-4 0 -4.073992188047271E-8+1.7227739275553364E-8i -1.1599901834030196E-7-1.2662655247585131E-8i 1.705270573596057E-5-4.242817128108372E-6i -7.240694952598525E-5 1.5695880384956068E-4 -1.3448526613619621E-6 6.413010157512044E-7-1.3687695411361092E-7i 1.096766958128378E-6-2.335170537173032E-7i 1.5606297359645966E-5-3.9944152184362425E-6i -7.227588944238461E-5 1.5499999999999992E-4 0 1.268334928195003E-7-9.609885998074219E-9i 1.1672289801202657E-6-2.4493465520620614E-8i 1.9236146644086228E-5-4.558634218824301E-6i -7.29584216044146E-5 1.5459283160336337E-4 -1.2592936603067935E-6 1.314152984699699E-6-2.5426247849927E-7i 2.84560825098032E-6-4.483009406311334E-7i 1.7506789850437064E-5-4.461327589195325E-6i -8.176152999711297E-5 1.5693027851481852E-4 0 -1.493530081090692E-8+1.7127150346111602E-8i -7.4120522376477E-7+9.513597133229783E-8i 2.085361108162043E-5-5.207517721136259E-6i -7.997092494367014E-5 1.5688914413250377E-4 0 1.8095028558873239E-9+1.1344793837686495E-8i -2.048544079008563E-7+1.0032356254074948E-8i 1.9719042125044195E-5-4.948704713694816E-6i -8.091720796458457E-5 1.5499999999999995E-4 0 8.801136597291759E-8-1.3260648634716432E-8i 5.493797644461838E-6-8.171203226035103E-7i 2.8949889773554115E-5-6.651203452290205E-6i -8.054163478105773E-5 1.558238313872396E-4 -1.1443541293928278E-6 8.473920882662899E-7-1.9445140159216182E-7i 3.3618372455226164E-6-6.406467455623919E-7i 2.165131644517946E-5-5.354029745036323E-6i -7.918891229238128E-5 1.5499999999999995E-4 0 1.8835846925841742E-7-2.9687545509217628E-8i 5.037647016844509E-6-7.197716800526573E-7i 2.6325116065495434E-5-6.105863784479136E-6i -7.834666113313104E-5 1.564424286277827E-4 0 2.838480444376159E-8+4.9809083675759905E-9i 3.2628223442521254E-8-2.5096122647177473E-8i 1.9927765713389847E-5-4.927135923443784E-6i -7.666955853293848E-5 1.569942484802318E-4 0 -1.7774140988885412E-8+1.4115648115653467E-8i -1.92705499342527E-7+5.143908242931372E-9i 1.80858949732178E-5-4.533512797056233E-6i 9.935632988001283E-5 1.7212243549842723E-4 0 2.632763244237856E-9-2.173359560943527E-9i 2.655740848672754E-9-5.4931903836138724E-9i 1.8267974761492783E-6-4.150702018689338E-7i 1.0511271674689237E-4 1.6795825338027394E-4 -5.8576715893411425E-6 8.521160437640968E-8-2.72232577935865E-8i 1.035769803004272E-7-3.2329999357396683E-9i 1.7985552557102134E-6-3.9451633341827477E-7i 1.9437629296696225E-4 1.8485473354307806E-4 0 1.3214739018189458E-9-1.6433772646123642E-9i 9.007981765184774E-10-2.8398846743160587E-9i 8.025427869483615E-7-1.8272414052564408E-7i 1.7744306205469523E-4 1.72599352600553...
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