H_75nm_L1_65um_D_4um

1281754143756872e 4 0 7062655024983493e 8

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Unformatted text preview: 874E-6 1.5080228394208137E-7+2.321728497508734E-8i -3.762630432296148E-8-2.6628783876780377E-9i 8.655480222885566E-7-1.5838702085788764E-7i 2.1839877201361218E-4 -1.299862543692892E-4 -2.7439478173043336E-5 2.2530301658735408E-7-1.602124659595636E-8i -9.529721497849702E-8+1.0937813366874437E-9i 7.691589859660978E-7-1.8802043976515484E-7i 2.2062132317884848E-4 -1.3742332723124082E-4 -2.3148058362777372E-5 1.8302917126805695E-7-1.1989696322025625E-8i -8.349464866101039E-8-3.903150427733558E-10i 7.568423313528985E-7-1.77105019520389E-7i 2.2045651697210803E-4 -1.1179697217209093E-4 -1.7187950205433664E-5 2.0978053488918276E-7+1.4740122868727326E-8i -5.978542040986691E-8-1.6993945010812033E-9i 8.364385824374541E-7-1.8385147204689218E-7i 2.168164833457881E-4 -1.221070584882814E-4 -1.3678029000570896E-5 1.974978663812361E-7+2.579092151855092E-8i -6.531709760920164E-8-6.936912887095956E-9i 8.418524737414397E-7-1.8427318817437663E-7i 2.1871217519226028E-4 -1.2041757689388478E-4 -2.032023773193859E-5 2.1416073112296005E-7+4.545235138685196E-9i -7.568106963408231E-8-2.2965722317543255E-9i 8.10491472147886E-7-1.8846370323337846E-7i 2.2031372211392663E-4 -1.1668586510250028E-4 -1.3813358919313024E-5 1.8854974923912946E-7+2.1586202403130006E-8i -5.4552757605329466E-8-3.5629751715939516E-9i 8.440069045589452E-7-1.7576130395377887E-7i 2.214271370072615E-4 -1.2261789599699003E-4 -1.1416247876486275E-5 1.579533657677652E-7+2.0004052503639807E-8i -4.84775242375697E-8-4.0659379812665875E-9i 8.377752188811657E-7-1.658283431195949E-7i 2.202419681159646E-4 -1.2664640743382724E-4 -1.7140223343120848E-5 1.8140975157005283E-7+6.9760544053605546E-9i -6.826992663929028E-8-3.6641730591023574E-9i 8.021815903480658E-7-1.7854964678548442E-7i 2.1867465254207617E-4 -1.2659411437976735E-4 -1.2710700744242636E-5 1.7263491917864585E-7+2.1059546647687405E-8i -6.047379860392159E-8-6.46607481613753E-9i 8.294521929563397E-7-1.7499518036642585E-7i 2.244637269253457E-4 -1.0716863541063497E-4 -2.04090264559098E-5 2.1027542300203523E-7+2.691003450784191E-9i -5.771331449061648E-8+1.4532745455503867E-9i 8.133610563981571E-7-1.8070927359832694E-7i 2.2275191784890927E-4 -1.2870928227381328E-4 -1.069585941466879E-5 1.3335209820232105E-7+1.3548133401452302E-8i -4.586059299412783E-8-3.847552597721236E-9i 8.17030509983807E-7-1.6079994316957326E-7i 2.2210262076662184E-4 -1.3264361775787808E-4 -1.656443748553341E-5 1.578494783845702E-7+1.8395848286372396E-9i -6.476910565074742E-8-3.0189145631847793E-9i 7.816888652515374E-7-1.7147389621265854E-7i 2.2388849431383818E-4 -1.27951751906904E-4 -6.407684728358173E-6 9.662990032261518E-8+1.3747384144340154E-8i -2.8774314008249314E-8-2.8241407022951296E-9i 8.411394199663309E-7-1.469280623850307E-7i 2.2517623526589818E-4 -1.354400288386197E-4 -1.1774471753505278E-5 1.1367065186885057E-7+2.4704221401932367E-9i -4.601203258051258E-8-2.3383380242359066E-9i 7.766966959298527E-7-1.5940859274641205E-7i 2.2698327174229015E-4 -1.3658455984233883E-4 -2.7751039659351696E-5 1.8850405838748...
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This document was uploaded on 01/24/2014.

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