H_75nm_L1_65um_D_4um

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Unformatted text preview: 284E-9i 2.887171686642116E-5-7.608217957421612E-6i -1.1068863872876707E-4 1.582139377535888E-4 -1.5405775957847153E-6 4.784280415859668E-7-1.2929559801352907E-7i 4.465643110326475E-6-1.1076052108066615E-6i 2.946244108650853E-5-7.750172042255559E-6i -1.1287104120900565E-4 1.57492091409971E-4 -1.3749739782948086E-6 4.729668104455631E-7-1.2729068095484402E-7i 5.377976033828687E-6-1.3237898291933941E-6i 3.246442731065039E-5-8.526548708084584E-6i -1.1461481937941639E-4 1.585661102825295E-4 0 -3.1800359622289846E-8+2.165693650801881E-8i 5.510956196007226E-8-1.8360477469588823E-8i 3.0587675357901565E-5-8.070781473017955E-6i -1.0910951163741985E-4 1.599253526066596E-4 -2.203795204885485E-6 5.7177922670789E-7-1.5652194858273294E-7i 4.030825644273789E-6-1.019469534086631E-6i 2.5036090042727596E-5-6.6262426019173155E-6i -1.1806204399946594E-4 1.568393066465493E-4 0 1.2988857431284195E-7-1.3706217341646898E-8i -1.01393929202373E-6+2.2391147421266244E-7i 3.761250835105739E-5-9.880845783218881E-6i -1.1761385669159233E-4 1.5602813433324232E-4 -1.234543974476105E-6 5.229250326324597E-7-1.4176607130896487E-7i 9.373584568586381E-6-2.2860277537261236E-6i 4.009924222797572E-5-1.0508022286350559E-5i -1.1696674010272575E-4 1.5891787973060028E-4 0 -1.309050702731629E-8+1.7969154619129624E-8i -4.2835895419646164E-7+9.934197451330964E-8i 3.033670483991972E-5-8.032785738372723E-6i -1.1515984052762759E-4 1.5699062080181618E-4 -1.5027050246482272E-6 5.156804789964789E-7-1.414956732348945E-7i 7.1462636713833134E-6-1.7562473269367464E-6i 3.469076686467027E-5-9.121902359897696E-6i -1.1949093362811783E-4 1.5877594854715618E-4 0 -5.392588777229325E-8+2.695360624651076E-8i 6.23122266445709E-9-3.646488708208828E-9i 3.110206685583444E-5-8.25876089981903E-6i -1.1921465687900361E-4 1.5728704741422493E-4 -1.281062751232343E-6 3.845539899321068E-7-1.0186248230667494E-7i 5.7170508511674385E-6-1.4258302839165623E-6i 3.523463571094196E-5-9.306385934455164E-6i -1.1043830015575743E-4 1.6186353732264042E-4 0 1.2533104624869867E-8+1.044750066667155E-8i -7.086987849650936E-8+1.2085281170335499E-8i 2.295627452267067E-5-6.0995839345075535E-6i -1.422495417712724E-4 1.5688152300963155E-4 0 6.566660076353706E-8+3.0513649029381695E-10i -1.3169599562744074E-6+3.2519940118547197E-7i 4.32247362715238E-5-1.1501310261609245E-5i -1.4407788116915527E-4 1.5671465924228334E-4 0 6.631129562985338E-8+3.82350404809495E-10i -8.344310399536342E-7+2.0173480421228907E-7i 4.3871857395018204E-5-1.1675870339871576E-5i -1.4366158668782992E-4 1.5520137681497166E-4 -7.882389886078204E-7 -7.413505617726024E-8+2.986299188142971E-8i 1.7189546778420203E-5-4.187358865342938E-6i 5.472064783026802E-5-1.4471050361317822E-5i -1.4313585216390318E-4 1.5499999999999995E-4 0 -4.665863977959539E-7+1.2702563800814914E-7i 2.0879796156936247E-5-4.869373371335639E-6i 7.069548381749145E-5-1.8407885554874058E-5i -1.4486414783610645E-4 1.5499999999999997E-4 0 2.31202454227993E-7-3.877232651836963E-8i 2.1953814726131162E-5-5.130866492135321E-6...
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This document was uploaded on 01/24/2014.

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