H_75nm_L1_65um_D_4um

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Unformatted text preview: 1.741024902206292E-6-6.023509821584944E-7i 1.3933495697025282E-4 3.221908045082883E-5 0 8.352064746734332E-8+4.3259988660119405E-8i -3.371435143707368E-7-1.13120765765206E-7i 1.7910731030506895E-6-7.17527432303626E-7i 1.4028325004780416E-4 2.799864154306864E-5 -4.79219142273082E-6 1.885884268088033E-7+2.1120490438345353E-9i -3.0595557613853384E-7-1.1662361726848501E-7i 1.8895398816674455E-6-6.692487772473206E-7i 1.411255239823155E-4 3.4774362546150994E-5 -5.2696921585951875E-6 2.0634408179126841E-7+5.187325871994407E-9i -2.4091578916382336E-7-9.031709644882365E-8i 1.7788775054862927E-6-6.786741591870711E-7i 1.3995792395777432E-4 3.956887091226712E-5 0 9.317885974280492E-8+4.851585881651081E-8i -2.5956121112793996E-7-8.015590216869407E-8i 1.6869995726431176E-6-7.226045821970148E-7i 1.3429040357003285E-4 3.484039997705923E-5 0 6.972182435233547E-8+3.823308748809851E-8i -3.1265250260809846E-7-1.0330393460302334E-7i 1.8729297663097306E-6-7.663169929973814E-7i -7.489364838477088E-6 -2.3768451127009744E-6 -5.033418148815474E-7 5.048209197480206E-4-1.1766791241521788E-4i 1.2580208139212774E-4-2.9201302639185146E-5i 0.0014461308042251241-3.371102611952465E-4i -7.662472134488518E-6 -1.7431500952163238E-6 -4.946836750726271E-7 4.948843104631137E-4-1.1538338296071906E-4i 8.427289860712772E-5-1.9600314087283602E-5i 0.001503243659790037-3.5047745393861237E-4i 1.0518493443711018E-5 6.307968767105567E-6 0 7.293129307225376E-9-3.197566850598686E-8i 1.3631113320033972E-7+1.2040952525525584E-7i 5.4750023131842595E-5-1.3819125724513497E-5i 1.1589553240379382E-5 6.511426997268017E-6 0 1.540965781435255E-7+3.630496183543164E-8i 1.7182847248959493E-7+1.6013801705343222E-7i 5.035569724043333E-5-1.2723189027074389E-5i 1.1300138408199386E-5 6.487359692194775E-6 -5.810990540093044E-7 2.3311851388000115E-6-5.343163698493953E-7i 5.710595441132629E-7+4.7280476823927394E-8i 5.1594286387505535E-5-1.287346481669763E-5i 1.0929847485586335E-5 7.209522423457079E-6 0 9.286933683530507E-8-1.5453257420800874E-9i 4.079494347215366E-7+2.7019765886741415E-7i 5.241545652049325E-5-1.3194066841814137E-5i 1.3961480296527048E-5 6.34278624482918E-6 0 9.442870935050038E-8+4.586879490734313E-8i -1.7449377551135165E-7+1.0318750576248135E-7i 4.290931533024273E-5-1.0807236153523182E-5i 1.379821633107856E-5 5.570284922550077E-6 -8.159470623580804E-7 2.4450014611918525E-6-5.312878824724845E-7i 5.234419935669365E-7-1.1871725972617195E-7i 4.3924136787320235E-5-1.0817863871665727E-5i 1.2926122284410396E-5 5.662022195375397E-6 0 3.207135222916691E-7+7.37487175467742E-8i -5.399850178729616E-7-6.716371377346061E-8i 4.6979444716016906E-5-1.1681771883495035E-5i 1.2840058312433963E-5 5.821806581980748E-6 -9.396478493582332E-7 3.143298759562376E-6-6.791176150561234E-7i 6.010046869387014E-7-9.137629876502459E-8i 4.6693304106714333E-5-1.1526508982734833E-5i 1.2656793393642482E-5 6.584730976224158E-6 0 2.0275020577165126E-7+5.8893938423287826E-8i 9.110849045826375E-8+1.4208840035390137E-7i 4.672609038549061E-5-1.17798453...
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This document was uploaded on 01/24/2014.

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