H_75nm_L1_65um_D_4um

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Unformatted text preview: 559937583E-8-1.9216150236572166E-8i 1.6368818354933775E-5-3.7995450925222817E-6i 3.221772809352344E-5 1.1318240688389889E-5 0 3.021093108570874E-8-1.91710374563467E-8i 2.94306519063718E-8-5.8390673562063785E-9i 1.7446827188355093E-5-4.0543186521159205E-6i 3.5679601189471695E-5 1.1311984930048152E-5 0 2.983196478388389E-8-1.94973994602197E-8i 3.4374979023362974E-8-1.3385349801932808E-8i 1.550387978930139E-5-3.5813518146061267E-6i 3.6520156058696716E-5 1.1416975817449132E-5 -1.3716605968004842E-6 6.943261891072974E-7-1.7730486831067248E-7i 1.2716451477630744E-7+5.4451457302947745E-8i 1.5068429641154494E-5-3.5407661045901498E-6i 6.823905116145868E-5 6.075310287900593E-5 -1.8918891017555182E-6 -1.3737818933568884E-7-2.2740689402250824E-7i 6.688431022448122E-8-1.905248835666155E-8i 5.87339876527704E-6-1.0949213347270774E-6i 6.734296114738703E-5 5.867669845543021E-5 -1.0137381176003994E-6 -3.0946931590060555E-8-1.2418663215906727E-7i 3.7437491391630435E-8-1.2418254907941742E-8i 6.040539410298719E-6-1.1058255800652399E-6i 7.36462459554694E-5 6.931153051337528E-5 -2.6639326879524484E-6 -4.806782790655858E-7-3.662395322964122E-7i 8.768675819373047E-8-1.4197066380497317E-8i 4.765241251063098E-6-1.145952657632932E-6i 7.663598163901622E-5 6.722379894818219E-5 -2.851821680798695E-6 -4.6057108873658586E-7-3.504243958788192E-7i 8.476626869681806E-8-1.2352679880540176E-8i 4.4409554754165495E-6-1.1868869737060637E-6i 6.727212640860369E-5 4.166345804031416E-5 0 2.4173820858547818E-8-1.8581050040614167E-8i 3.008531028903666E-9-3.770900091314144E-9i 6.620737876209502E-6-1.2311379284276243E-6i 6.71586488868116E-5 4.504862490024416E-5 0 2.4566796076597175E-8-1.6417273055481057E-8i 6.264873294326938E-9-2.9403166886219725E-9i 6.512800364305052E-6-1.2184505229325273E-6i 6.727039361708925E-5 4.689944686773764E-5 0 1.2824944339652676E-8-2.4646191615351754E-8i 2.8355759698524325E-9-4.201157302048551E-9i 6.458254531717605E-6-1.1892723764218814E-6i 6.735376941715796E-5 5.196005647626172E-5 0 2.5767561240236777E-8-1.4217306374349401E-8i 5.51649265194112E-9-3.3042267144127247E-9i 6.3057144169643074E-6-1.1301277510314575E-6i 6.754624625732133E-5 5.295096678625741E-5 -2.051021300409884E-6 -3.13960084065033E-8-2.044055218083235E-7i 7.214227123785236E-8-1.967863618463489E-8i 6.140059821235344E-6-1.1970392244340342E-6i 6.718578241866844E-5 5.024675439848234E-5 0 1.8042270175425666E-8-1.973211688334562E-8i 4.293451912051882E-9-4.282377294440032E-9i 6.34144119707955E-6-1.1754638263493379E-6i 6.768642031018081E-5 4.000765377109718E-5 -1.428332807069483E-6 -1.2918484225730676E-8-1.7148731176605855E-7i 4.190158282259164E-8-1.6277601890578415E-8i 6.593878813087656E-6-1.267115361508048E-6i 6.713976463773057E-5 3.989814322216407E-5 0 2.7429619932177463E-8-1.493577457978984E-8i 4.776576236105445E-9-2.205717690093034E-9i 6.64545682440795E-6-1.2789193131903158E-6i 6.674146155892232E-5 3.851776320690113E-5 -1.1039956202959227E-6 4.775794526686028E-8-1.1096269457261464E-7i 3.3032890182260434E-8-1.344...
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This document was uploaded on 01/24/2014.

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