H_75nm_L1_65um_D_4um

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Unformatted text preview: 1101E-7i 9.158024118389953E-5 1.5586259582306837E-4 -1.136105464500165E-6 1.659281385797684E-8-1.2022670384942425E-8i 1.3303166573122583E-7+4.8859335762679866E-8i 2.4024000236110706E-6-3.7653880387150675E-7i 1.5847695905239285E-4 1.5652904104815745E-4 -1.7557194481558244E-6 2.525583575586042E-8-3.105641291276534E-9i 1.2157276961385135E-7+4.312301161885466E-8i 1.4461497163454903E-6-1.5165858657708448E-7i 1.5776248821615743E-4 1.5688437475703574E-4 0 1.2196969210806717E-9-2.8674748968511576E-9i 3.468201171998725E-9-1.1074897154732255E-8i 1.4747491186155235E-6-1.4503066262998262E-7i 1.5956989364069438E-4 1.5691894617235355E-4 0 2.7586396143981785E-9-1.6995019612962847E-9i -5.5280941838042885E-9-1.650169159980036E-8i 1.452565555622301E-6-1.4304841437927705E-7i 1.6045375927792297E-4 1.5736418534280535E-4 -1.4686533188990555E-6 1.9475440790750968E-8-3.662089924039476E-9i 8.222262464954468E-8+2.5389594515503352E-8i 1.3991293468795254E-6-1.5807321616388386E-7i 1.560955443106451E-4 1.5637673173635769E-4 0 4.683574569516215E-9-8.924873289253347E-10i 3.4258213052077278E-9-1.2608930409694987E-8i 1.5470136101556294E-6-1.220080157967078E-7i 1.5877531654651404E-4 1.5904158669978317E-4 0 2.66042742277812E-9-1.9022975359291503E-9i 9.251097637507505E-10-8.18056599052643E-9i 1.3647715462412894E-6-1.8217798048207534E-7i 1.5785844066670628E-4 1.5936587612991034E-4 -1.5600719432829264E-6 1.9711891943445897E-8-4.3877287128158936E-9i 5.309901685289555E-8+1.156774153637193E-8i 1.3542417943733392E-6-1.9128638373240596E-7i 1.4918650075450337E-4 1.5704882197798453E-4 0 1.847945998566941E-9-2.5470853981090365E-9i -8.818734582253378E-9-1.8231518936120265E-8i 1.568423933590371E-6-1.6389932305516107E-7i 1.5076515176577182E-4 1.572189345130087E-4 -1.5272824986672047E-6 2.1330821951908097E-8-4.36967522511129E-9i 9.689272589239724E-8+3.1279554837480774E-8i 1.5199184683512086E-6-1.7076286849205335E-7i 1.4847031271767561E-4 1.5711025954211368E-4 -1.6545006298331173E-6 2.2808973841958572E-8-4.985817217338903E-9i 1.0815636714918987E-7+3.6051445140578765E-8i 1.5454004050505682E-6-1.7675154127463537E-7i 1.5270963557440968E-4 1.5693906373397706E-4 0 2.257286462869351E-9-2.1671461918407185E-9i -1.7153185446691644E-9-1.3955809111251479E-8i 1.530593269360531E-6-1.554640292325156E-7i 1.5354720718303716E-4 1.5754773197215437E-4 -1.1827906198874422E-6 1.6925825807064708E-8-3.608091650515925E-9i 7.068513696796255E-8+2.0155015308244738E-8i 1.481442765704245E-6-1.6746645342294616E-7i 1.561362230359052E-4 1.586516883392091E-4 0 1.964285033010603E-9-2.2518233651051497E-9i -1.7788259740549529E-9-1.0036790209504072E-8i 1.4099975319339738E-6-1.8053277342404774E-7i 1.5711598942709122E-4 1.576363240133918E-4 -1.9992432097856017E-6 2.6379433053257736E-8-4.43194104224158E-9i 9.860506781922407E-8+3.127617684021348E-8i 1.410455916886033E-6-1.7526104381833385E-7i 1.483817521261841E-4 1.589172275670804E-4 0 2.3658675232665974E-9-2.249230472879671E-9i 4.353423945933823E-10-8.701685045308594E-9i 1.49018951003946E-...
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This document was uploaded on 01/24/2014.

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