H_75nm_L1_65um_D_4um

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Unformatted text preview: 10021754E-7i 3.6745011368331817E-7-9.986607760646898E-9i 1.394805158947201E-5-3.3700719838792353E-6i 4.694676276712191E-5 -9.899613344025301E-6 6.661119044731754E-6 -1.925292874514561E-6+4.6846094869185513E-7i 2.53533675369542E-7+1.1349693672055034E-8i 1.0872605504545802E-5-2.6466533173398533E-6i 5.213326214659483E-5 -9.912142208974998E-6 5.874831725751476E-6 -1.361304946452968E-6+3.3857956281178685E-7i 1.895964102017149E-7+3.458102238165717E-8i 9.603144774731094E-6-2.3216103788013945E-6i 4.24921081773896E-5 -1.2238779693341075E-5 5.330303178444983E-6 -1.8687126335479238E-6+4.481001529001399E-7i 3.055861066712578E-7-1.015644842703439E-8i 1.2308063716289931E-5-2.9658178149593716E-6i 5.3649609885699236E-5 -1.2902641307114892E-5 7.130996370527672E-6 -1.5224843537874903E-6+3.8555955483384834E-7i 2.1221264536390736E-7-4.48944825275274E-9i 9.146120086515229E-6-2.192012581269099E-6i 4.944526891733361E-5 -1.4900212660539204E-5 7.5046710704784955E-6 -1.8801585253721755E-6+4.6590878944317973E-7i 3.0041417692888315E-7-3.811998348007611E-8i 1.0017517315785208E-5-2.411647737485124E-6i 2.6837772365173362E-5 -2.249836326156615E-6 5.82494318869482E-6 -5.2540691658599105E-6+1.2382579229228993E-6i 2.59039055161884E-7-3.424389301274271E-8i 2.1335317194005685E-5-5.2616698261297896E-6i 2.0167569125265783E-5 -3.1211950863605264E-7 6.4179091169726314E-6 -9.862764470847043E-6+2.319890250801243E-6i 7.208682907062508E-8-1.341943686225562E-8i 2.8376964300133966E-5-6.930147689402711E-6i 1.1257072085801496E-5 -1.0016529611491817E-5 3.5700395607636684E-6 -1.1663312528602461E-5+2.7317194664440826E-6i 3.316138788234966E-6-6.354591014891911E-7i 4.710042132542985E-5-1.123929873564565E-5i 7.967919009299647E-6 -9.057436332398921E-6 5.859739794313887E-6 -2.7358353724838362E-5+6.416160505936174E-6i 7.79437257008985E-6-1.7586440856093743E-6i 5.4728206873532026E-5-1.3060039241396142E-5i 8.196486803802415E-6 -1.1334016572267747E-5 3.062314815088169E-6 -1.3530704178778968E-5+3.1689554732153787E-6i 4.790971172863793E-6-1.0368651786080418E-6i 5.734625628101196E-5-1.360247927148439E-5i 3.3291099597682746E-5 -1.1470108696630693E-5 6.150890809441385E-6 -3.446362256011094E-6+8.172635565633781E-7i 6.061459783037118E-7-7.783402659975209E-8i 1.6267308970569194E-5-3.94660180687343E-6i 2.764061283894111E-5 -7.2279832079294135E-6 5.762315444309292E-6 -4.8710058454666994E-6+1.1476457899408063E-6i 6.704723143648881E-7-7.358576039946494E-8i 2.047011281363696E-5-5.01302046279861E-6i 2.8505658857018533E-5 -1.1441938014754316E-5 7.340299387808193E-6 -5.384153027243985E-6+1.274857169748196E-6i 1.0347481999053694E-6-1.828733695171843E-7i 1.8908356489778875E-5-4.587726142270135E-6i 1.7642108784874265E-5 -7.042939853768761E-6 4.469101354962677E-6 -8.193748489864016E-6+1.914901523845309E-6i 1.4220094891577903E-6-2.2157001134897194E-7i 3.285263009755459E-5-7.977678116534625E-6i 2.109012088293648E-5 -4.619510119520202E-6 4.704824285128383E-6 -6.684716804732932E-6+1.5668587061246336E-6i 6.985007063352513E-7-9.989242268319589E...
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This document was uploaded on 01/24/2014.

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