H_75nm_L1_65um_D_4um

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Unformatted text preview: 67194E-8i -4.0123485290177335E-8+9.81799687458556E-9i 1.7772973782456557E-7-4.551997753273474E-8i 4.485438000908488E-4 -2.9395565263121376E-4 -2.1230134430926233E-4 9.772608569164355E-8-2.505667317130345E-8i -4.919174664540831E-8+1.2378718384788348E-8i 8.696577792786662E-8-2.2669959822016323E-8i 4.530656830708492E-4 -4.0562885607217056E-4 -1.817970884288513E-4 5.929662457480965E-8-1.5319873289164647E-8i -4.1187685449624756E-8+1.0489782921408978E-8i 8.067795898579282E-8-2.0971445103194288E-8i 3.0116868472011523E-4 -2.576323454794059E-4 -9.53576824371394E-5 1.419816595235829E-7-3.588665111830175E-8i -8.508769080513944E-8+2.0611949082355213E-8i 2.629368024620287E-7-6.725643229113777E-8i 3.723466986467122E-4 -3.178696242796285E-4 -1.6956604433575234E-4 1.1205093166970008E-7-2.8760076909243807E-8i -7.085201829442377E-8+1.7786534042166468E-8i 1.2624946903478858E-7-3.275739013648137E-8i 2.831341799655653E-4 -2.9270679365518915E-4 -2.0108643509905578E-4 2.0636539862287674E-7-5.3153177491003036E-8i -1.4473777767528314E-7+3.6226027960104436E-8i 1.4106225034826247E-7-3.6987731096133465E-8i 2.7266021916169545E-4 -2.873406601980607E-4 -1.3297099482645943E-4 1.8026237799295403E-7-4.619434870242124E-8i -1.2909797154690462E-7+3.192554338225203E-8i 2.2859547509053114E-7-5.9093607288533604E-8i 2.2941339757879032E-4 -2.52621089500239E-4 -1.5101084175425645E-4 3.025686169233147E-7-7.761052933475788E-8i -2.1186167565896808E-7+5.19466717881965E-8i 2.6213084545769153E-7-6.846912722814867E-8i 2.3319687623025938E-4 -2.66697320889342E-4 -8.175758821453053E-5 1.804092959588405E-7-4.5939308842498506E-8i -1.3256166600104563E-7+3.186143654717827E-8i 3.722354671557844E-7-9.51293641540339E-8i 1.9086094697161744E-4 -2.5804475351242956E-4 -1.327087663837962E-4 3.380781301509254E-7-8.73558835000981E-8i -2.7111403834793396E-7+6.658392252301192E-8i 3.418363653018877E-7-8.900344746380872E-8i 1.443744794997472E-4 -2.48033677716065E-4 -1.1610180201603155E-4 4.483839183028215E-7-1.1713094763393264E-7i -4.049378960224794E-7+9.974151140260052E-8i 4.870826233045002E-7-1.2673267857986758E-7i 3.845543402151679E-4 5.8579422942335504E-6 -4.161620430009128E-5 7.266802383991063E-8-1.7550332920331742E-8i 9.033164402667449E-10-2.140034079495286E-10i 2.80894863210208E-7-7.002529389397008E-8i 4.5774044535167637E-4 5.74802169355852E-5 -5.5045031803133686E-5 5.387483876051802E-8-1.3463750985036512E-8i 5.220998527606447E-9-1.275923411555091E-9i 1.8462165687194362E-7-4.6769426529001136E-8i -2.065173060116722E-4 -1.5586807229198908E-4 4.134198745876725E-7 2.547706023000214E-7-5.435214955884504E-8i 1.7687777366104385E-6-3.8870548187593573E-7i 2.3257320465745284E-5-5.668336006588633E-6i -2.7997481079052964E-5 -8.802636955469534E-6 3.044682030957534E-6 -1.871042255237364E-5+4.303496779215048E-6i 0.0014879712658591867-3.458806428502682E-4i 8.734447227301588E-5-2.098669452777922E-5i -2.8165945416998254E-5 -1.0301214002297518E-5 3.1409626206538413E-6 -1.9602495590072527E-5+4.545033040245783E-6i 0.0010265683919736075...
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This document was uploaded on 01/24/2014.

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