H_75nm_L1_65um_D_4um

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Unformatted text preview: 345460348883E-4 0 -9.643768441337918E-11+2.2769913090566888E-11i 5.2457521368329034E-11-1.0986278142186572E-11i 2.392103652890399E-9-5.932912931562394E-10i -6.62564686183983E-4 3.96987324246032E-4 -6.591009793571703E-5 -5.87768613587366E-10+1.4787698440643949E-10i 3.716564215844033E-10-9.394410410094579E-11i 2.3204544910325573E-9-5.760764245730335E-10i -6.956612854672475E-4 3.7183439240355033E-4 0 -6.077232090904643E-12+8.853151936254595E-13i 3.32798437353046E-12-3.026008648367227E-13i 3.33425773014751E-10-7.905986565077572E-11i -6.741886280468599E-4 4.039520141450852E-4 -6.706641544336123E-5 -8.089920579089424E-11+1.9961855658361395E-11i 5.017330845377509E-11-1.2647601140639654E-11i 3.244972237920308E-10-7.705193323218967E-11i -7.076554455615103E-4 3.782453302036122E-4 0 3.80423407367103E-13-5.03907186316334E-13i -2.011728407048045E-13+2.767149620766919E-13i 2.1054764867293E-11-4.359055946509771E-12i -7.196496056557733E-4 3.846562680036729E-4 0 -4.588659331751075E-19-9.757798527130003E-21i 2.506513490577372E-19+8.835099216520287E-21i 1.8572813011968047E-18+4.5458563722631006E-20i -4.5784676034888496E-4 5.049895789516027E-4 -3.0800303438166543E-4 -8.647251373328169E-8+2.2392258660439172E-8i 1.2649573515615994E-7-3.2942464292611833E-8i 3.203784909073224E-8-8.133427839850202E-9i -4.661712469006828E-4 5.141712076598136E-4 -3.1360308955224114E-4 -1.1726200775643185E-8+3.0018941079138573E-9i 1.4483683119771027E-8-3.756649061787027E-9i 5.212588021580384E-9-1.298716296227815E-9i -4.911447065560768E-4 5.417160937844466E-4 -3.304032550639684E-4 -1.899501698286976E-11+4.403865797501293E-12i 2.1736125129950846E-11-5.615475633457862E-12i 7.804594336161415E-12-1.277639038333965E-12i -4.994691931078747E-4 5.508977224926576E-4 -3.3600331023454414E-4 -3.6830248728636904E-19-1.4592820010576886E-19i 6.248205541321109E-19-1.6518392874419218E-19i 1.5962967297629194E-18-5.040524230495054E-20i -4.988278410531851E-4 4.98795547992222E-4 -2.4875245987398186E-4 -8.355972399988158E-8+2.16688465542819E-8i 1.0769703651988022E-7-2.8025434143576032E-8i 5.980928250218231E-8-1.5360859294027565E-8i -5.07897438163243E-4 5.078645579557169E-4 -2.5327523187169065E-4 -1.0753341543973722E-8+2.7564900684045733E-9i 1.1891878171724898E-8-3.0810686368962568E-9i 8.317206574003092E-9-2.0987636346861036E-9i -5.351062294934169E-4 5.350715878462019E-4 -2.66843547864817E-4 -1.6834441748370595E-11+3.9323937912402956E-12i 1.7414051655010836E-11-4.4852809762835664E-12i 1.2383952106872794E-11-2.3958950471783564E-12i -5.441758266034749E-4 5.441405978096969E-4 -2.7136631986252583E-4 -3.5495875375431746E-19-1.067074355897883E-19i 5.13821086711052E-19-1.3114580405653467E-19i 1.6905287494591007E-18-4.557457112816852E-20i -3.0948465276187814E-4 5.456559509882224E-4 -4.0740990765566554E-4 -5.191145696175574E-8+1.3305222645581456E-8i 1.4538202126285756E-7-3.786708334913284E-8i -1.3122652580856488E-8+3.560133470003923E-9i -3.151116464484578E-4 5.555769682789173E-4 -4.148173605221322E-4 -8.85417680594665E-9+2.244610492488593E-9i 1...
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This document was uploaded on 01/24/2014.

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