H_75nm_L1_65um_D_4um

198971959249853e 6 3152033290650064e 7i

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Unformatted text preview: 34003032525E-7i -1.8282547761802929E-7+3.185006792967614E-8i 3.93270828222012E-5-9.561593989722892E-6i 1.6839312234669048E-5 2.204194435515114E-6 0 5.8309140114667E-8-2.1620407798081542E-8i -2.08602750042777E-9-4.026975286217094E-9i 3.6694335295582055E-5-8.954999995158698E-6i 1.846023965987447E-5 1.575538567856406E-6 0 1.0278427754528118E-7-3.381912318856963E-8i 1.8375961931902422E-8-6.953932419384983E-9i 3.342501374411402E-5-8.181733076316798E-6i 1.4249083954765334E-5 3.015522952367294E-6 7.895915815871988E-7 -1.8917132165789586E-6+4.0584502448419733E-7i -1.3105267388374426E-7+1.332945328094172E-8i 4.3067452562370865E-5-1.0448378683274363E-5i 1.7486441673420417E-5 3.545243337175541E-6 1.5033186087896187E-6 -2.985468332869708E-6+6.908557227784197E-7i -3.461279405325906E-7+5.141623872686789E-8i 3.4975729773518874E-5-8.557294357237583E-6i 1.4148135940499021E-5 4.6807962215672545E-6 1.00128908015522E-6 -2.6720405227751603E-6+5.961856224053271E-7i -7.52960654196947E-7+1.7321311600358226E-7i 4.284721182975009E-5-1.0423092498716909E-5i 1.5870160562761653E-5 4.32940160561744E-6 1.3459330828395507E-6 -3.0871896835073844E-6+7.075574983986155E-7i -5.352602753387134E-7+9.221683165423333E-8i 3.8446672752565954E-5-9.389536741162036E-6i 6.140705210352799E-6 -9.574153054250376E-7 2.1164779197192555E-6 -1.8554077890957355E-5+4.370963655308356E-6i 6.465512127386246E-7-1.6162641933649065E-7i 8.392653634998378E-5-1.9719059185084834E-5i 7.206159930535141E-4 -1.1773812102319643E-4 -1.623401534230663E-4 3.217273203828201E-8-8.280462837123857E-9i -4.329459508906783E-9+1.103541285196345E-9i 5.216432841250288E-8-1.3568453542051187E-8i 7.368197470814297E-4 -6.728969885134398E-5 -1.0987609721569512E-4 2.178085611851926E-8-5.627750910452856E-9i -1.6520212235016157E-9+4.234321699768747E-10i 5.52318163608543E-8-1.4335264760616441E-8i 7.218893794095562E-4 -6.440182936571796E-5 -1.8501926459164932E-4 3.617013647322639E-8-9.298929984749576E-9i -2.753368718574627E-9+6.999722254665161E-10i 5.070733013837817E-8-1.3197501829578669E-8i 6.784194806619307E-4 -4.946728703297509E-5 -1.2624447562303864E-4 3.247141776304226E-8-8.340885970823436E-9i -1.993445101613198E-9+5.064319829280269E-10i 6.564544956889043E-8-1.7007709373857475E-8i 7.048776589511161E-4 -1.2261892246455354E-4 -2.182111036707924E-4 4.23463793444403E-8-1.0886385183101106E-8i -6.123681688938652E-9+1.5557433603182794E-9i 4.71415987463417E-8-1.2303340798923183E-8i 7.255938068528669E-4 -1.4682100060597655E-4 -1.0705709335594772E-4 2.0974748628226156E-8-5.426179336796632E-9i -3.6258958801493453E-9+9.317010821918142E-10i 5.562764010375616E-8-1.4439716729722412E-8i 6.797207089595455E-4 4.0236606200340006E-5 -9.83078769567424E-5 2.605103872456988E-8-6.707627051320679E-9i 1.1781287933297855E-9-3.025084236059899E-10i 6.871501195063282E-8-1.77761187018558E-8i 7.44751049660045E-4 5.158769680089321E-5 -4.6782299740820794E-5 9.266000306923105E-9-2.4443886411878895E-9i 3.8231504040601546E-10-1.0395796707139337E-10i 5.7597228671860184E-8-1....
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