H_75nm_L1_65um_D_4um

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Unformatted text preview: 88101E-5 5.986638616771656E-6 7.661173918894993E-5-2.07666097115939E-5i 2.0227580082920146E-5-5.295470015098917E-6i 6.626597705158114E-5-1.8221064646596545E-5i -2.1442296839337957E-4 -6.698280347969893E-5 5.516620445152864E-6 9.185174901069948E-5-2.4947625582004012E-5i 2.445795591313656E-5-6.343005636300688E-6i 6.910684130023172E-5-1.906009372666358E-5i -2.1754496498399784E-4 -6.11633662215337E-5 4.548364750647795E-6 9.137408337448988E-5-2.417309323895172E-5i 1.8805567884335568E-5-4.77259056421743E-6i 1.0171260408687539E-4-2.739913537749386E-5i -2.124005074557121E-4 -6.214441759784394E-5 4.996438908664852E-6 1.1339271420755737E-4-3.108098027672533E-5i 3.283840691862541E-5-8.445624595840914E-6i 6.425536233340039E-5-1.7896809284895255E-5i -2.196330090206032E-4 -6.485489789369187E-5 5.545883893399446E-6 6.221298332587311E-5-1.653298899738578E-5i 1.5123287473459267E-5-3.866481916679578E-6i 9.03549359612876E-5-2.414065470573756E-5i -2.221800693981938E-4 -6.052290485306044E-5 4.813992363932631E-6 4.554653906462553E-5-1.2049687694397002E-5i 1.1680710296253696E-5-2.9470043248883833E-6i 9.894005208503352E-5-2.6118156116755262E-5i -2.2545607481809764E-4 -9.213103998645557E-5 9.667845642502458E-6 2.003164882538334E-5-5.428685153686285E-6i 8.31559652810395E-6-2.236980095591542E-6i 3.793742213631928E-5-1.0180454189558753E-5i -2.1660112100115714E-4 -9.477916900240908E-5 1.4620876226271889E-5 3.1730895342809004E-5-8.772168601773881E-6i 1.6195583563035016E-5-4.4086433337120565E-6i 2.7018670443362104E-5-7.345697319590706E-6i -2.6400166181465894E-4 -2.2286064695965557E-4 1.2699528238390624E-4 1.0590780251694493E-6-2.7946799542192837E-7i 1.816233276470773E-6-4.801354989582288E-7i 4.635842897195703E-7-1.1640324650999181E-7i -2.0969220812006161E-4 -2.08383348840824E-4 1.0873246854202144E-4 1.2541845945326222E-6-3.3314338182936804E-7i 3.571342707644163E-6-9.515185239268025E-7i 6.069131987603743E-7-1.4685813531210476E-7i -3.702172400877265E-4 -2.4891282100808547E-4 1.815472857441081E-4 5.985916692228469E-7-1.5644467236920922E-7i 6.321440826060459E-7-1.6596448824258795E-7i 2.007952348671392E-7-5.0862321374882756E-8i -2.8959131410003235E-4 -1.8812822385470075E-4 6.72870914066578E-5 1.5979204963823183E-6-4.2586996683641684E-7i 1.8854319620355217E-6-4.997443152752015E-7i 2.04752651517997E-6-5.339116081332702E-7i -4.425723050215867E-4 2.472520118880137E-4 1.8569399516540192E-4 4.2537864580976643E-7-1.1114325864910296E-7i -3.52501189460362E-7+9.250939919308471E-8i 1.7623428895298372E-7-4.472285854637144E-8i -2.0058183017592388E-4 1.3839310470770133E-4 1.971710890761768E-5 1.0232523596564658E-5-2.8375626314750875E-6i -1.4713363119153178E-5+4.048345550731569E-6i 1.0715470196627249E-5-3.072214004257741E-6i -1.9853707209374207E-4 1.1547214067203004E-4 1.563847622202439E-5 2.365367055469201E-5-6.831953015393144E-6i -2.2890453821667226E-5+6.528450747871747E-6i 1.0106060257719798E-5-2.8867323308080622E-6i -2.0095739092428086E-4 1.2891235787008655E-4 1.4385063275722444E-5 1.595754669005694E-...
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This document was uploaded on 01/24/2014.

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