H_75nm_L1_65um_D_4um

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Unformatted text preview: 198582509E-6-1.4958199729280056E-7i 9.990723297547366E-5 -1.5499999999999992E-4 7.5E-8 1.3411168615223845E-8+5.125066283168111E-9i -4.645611571304435E-9+1.647602477663258E-7i 2.6454660457334686E-6-1.4726655404627054E-7i 1.003467560818409E-4 -1.558816599479622E-4 1.0925361973366777E-7 -1.96318884024705E-8-2.2325239859913304E-8i 8.536705313000673E-8+3.6269106099082876E-8i 2.3654079457938873E-6-2.544752130107891E-7i 9.022549492255079E-5 -1.5589394934960386E-4 1.3421575865885225E-7 -6.704269418888227E-9-2.7413370804514018E-9i 3.7624446580359986E-8+4.6576238836730707E-8i 2.487974859046526E-6-3.385137732087734E-7i 9.128205251553879E-5 -1.5499999999999997E-4 0 1.2002931019509491E-8+9.655876065953073E-11i 1.3942772236841234E-7+6.628642271213681E-9i 2.6114621226434667E-6-2.0206887151704552E-7i 8.955412339109362E-5 -1.5499999999999995E-4 0 -4.626682566869396E-9-5.85637409324536E-9i 1.6790393231233843E-7+1.7413553165828513E-8i 2.619537200653717E-6-2.331982067905804E-7i 9.125723931867551E-5 -1.5499999999999995E-4 7.500000000000001E-8 1.3309331526382568E-8-2.7837849108840996E-9i -7.826553768278195E-8+1.521217582863358E-7i 2.7378843348840176E-6-2.414860350140492E-7i 9.19217911395715E-5 -1.5577075818097312E-4 1.5846963143955258E-7 -3.879351721059307E-9-5.930149153726297E-9i 6.214631235795451E-8+4.8120507414823166E-8i 2.4771487327087825E-6-3.162260196493047E-7i 9.300998163998393E-5 -1.5499999999999995E-4 0 1.6010497439761505E-8-1.2997924118473027E-9i 1.2615614678904815E-7+2.6613635565345926E-8i 2.6246310835937964E-6-1.8428851933104201E-7i 9.298905685833752E-5 -1.5499999999999995E-4 7.500000000000001E-8 -6.805897923607101E-10+4.280926184287853E-10i -5.5240953677326687E-8+1.4738352384027355E-7i 2.700731937297196E-6-2.1740010673539955E-7i 9.26074942442019E-5 -1.5614110903359289E-4 2.2930121148718036E-7 5.47974384965122E-9+6.574052358043758E-9i 2.121092089989174E-8+2.052373851250955E-8i 2.417297212503741E-6-3.4789862981979627E-7i 7.57306903955324E-5 -1.5499999999999995E-4 0 -9.648257008870037E-10-5.906082190150486E-10i 1.5305527978832805E-7+1.3695977128079357E-8i 2.6613595327318676E-6-4.3634228826232996E-7i 7.570953464422302E-5 -1.5499999999999995E-4 7.500000000000004E-8 -1.2373411323318706E-9+7.048244526599825E-10i -1.0905259993724546E-7+1.2059458797831052E-7i 2.755233729695403E-6-4.6778160525162455E-7i 7.5408309408593E-5 -1.558755583087025E-4 1.1639972167389444E-7 8.42720161708943E-9+9.239512821501705E-9i -3.9774232500275344E-8+3.1960074933085056E-8i 2.639408357458031E-6-5.133873092203617E-7i 7.597486935761678E-5 -1.5592112080944315E-4 6.861260035670969E-8 8.542334969247057E-9-9.27022426183699E-9i 3.617297805458275E-8+1.1030327878858159E-8i 2.6138063542913106E-6-5.058305388959405E-7i 7.400276127109476E-5 -1.5499999999999995E-4 0 -7.93498825327199E-9-3.5442614988723253E-9i 1.5330148940146503E-7+2.3760294423506286E-8i 2.648113143018452E-6-4.58184322142674E-7i 7.74363051567493E-5 -1.5499999999999995E-4 7.500000000000002E-8 9.022092236154826E-9-3.9534340054046477E-10i -6....
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This document was uploaded on 01/24/2014.

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