H_75nm_L1_65um_D_4um

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Unformatted text preview: 61879025E-5 3.096147966300005E-6 0 2.3245887226716795E-9-1.008930768930057E-8i -4.228122622043967E-8-1.7178531223707083E-8i 4.894572569164891E-6-9.331848495754219E-7i 8.773866997728743E-5 4.999999999999998E-6 7.5E-8 5.794112190682192E-9+5.720150908079148E-9i 2.5535277181372716E-8+1.4188716716807932E-7i 5.392543295509118E-6-8.122409958537246E-7i 8.946403130289963E-5 4.999999999999999E-6 0 1.429169772486581E-8-1.2461174651390641E-8i 2.733806283304939E-7-8.46443479345983E-8i 5.1761410923140644E-6-6.997226724579304E-7i 8.859642775002707E-5 3.1280389284624784E-6 0 5.044936720181973E-9-7.163561395756911E-9i -3.580492278857671E-8-1.1825379769494727E-9i 5.008466120415992E-6-9.776633232106611E-7i 8.947023987438055E-5 4.9999999999999996E-6 7.500000000000002E-8 -1.3883151515878054E-8-5.299366754973145E-9i -3.3212815589884714E-8+1.4250023939683799E-7i 5.3214637835603515E-6-7.393514527267982E-7i 8.88041804394315E-5 3.996839841267032E-6 4.3201813532522257E-7 -7.655628840820569E-9+1.3114291963942331E-8i 1.4045871275028682E-7+4.4482921719162676E-8i 5.065215628925662E-6-8.934829471936767E-7i 9.812181188524364E-5 4.999999999999999E-6 0 3.1900570995992814E-9+2.6296758014148795E-9i 3.9590769964659093E-7-8.699135770455065E-8i 4.810774187589609E-6-4.809270418952385E-7i 9.639651946275302E-5 4.999999999999999E-6 7.500000000000001E-8 -5.4354026479784364E-9-3.3005934401563393E-9i 1.4115640766626664E-8+1.564704063333428E-7i 4.948918552773495E-6-5.669358109908707E-7i 9.466494956565994E-5 5.0E-6 7.500000000000002E-8 -3.570518933161093E-9-1.5898318787137366E-9i -6.788945385297399E-8+1.6504179041475872E-7i 5.092031822031317E-6-5.957312150544512E-7i 9.812808935984611E-5 4.9999999999999996E-6 7.500000000000001E-8 -1.4182260392473524E-9+2.4171976425274414E-9i 4.522627330985502E-8+1.5260447127891768E-7i 4.857484569279668E-6-5.319655516440963E-7i 9.379946819705564E-5 3.234515715052873E-6 0 4.856420960048972E-9-2.238205082067486E-9i -2.055659357018383E-8-2.485324650488503E-8i 4.691072675459015E-6-8.50487799117825E-7i 1.078106362060697E-4 3.629126673838901E-6 0 5.032007872108162E-9+5.724930140522825E-10i -6.387338882034655E-10-4.67172917517649E-9i 4.030966367615675E-6-5.617048432354955E-7i 9.301968812289193E-5 4.708023690547834E-6 1.281648268354089E-6 -6.743480779558578E-8+2.654713312454544E-8i 2.159679432702229E-7+1.336532839655723E-7i 4.812008130587821E-6-8.36511575214673E-7i 9.381609686516969E-5 6.425007586918649E-6 7.500000000000001E-8 1.9098827113453905E-8+4.597351740440402E-9i 7.330161487991829E-7+3.461871812719296E-7i 4.678252796813536E-6-8.994243409614335E-7i 1.0798986217220949E-4 1.4256470286200479E-6 0 2.958831376041983E-9-2.762555652623028E-9i -3.769993180086803E-9-1.8352512405522326E-9i 3.881757923506798E-6-6.394087820375425E-7i 1.1065600701891588E-4 1.120443748460682E-6 0 3.6877144412409237E-9-1.888993727799074E-9i 2.2382711755018124E-9+1.5970316667905916E-9i 3.756807316905188E-6-6.062873041572076E-7i 1.0919164814734948E-4 2.5419240739562813E-6 1.1806281656239312E-6 -4.804609083459...
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This document was uploaded on 01/24/2014.

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